标题: 全力推出 Thonas Swan GaN MOCVD [打印本页] 作者: shenshugce 时间: 2010-8-19 10:37 标题: 全力推出 Thonas Swan GaN MOCVD Configuration:
Thomas Swan GaN MOCVD system
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CCS (Closed Coupled Showerhead)
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6 x 2" wafer configuration
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Suitable for R&D as well as production
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More details and Gas mixing diagrams are available upon request
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