一、抛光片的规格如下:
p-type Si:B [100] 6" 625um P/E SSP 0—100ohm-cm Test Grade with flat.
二、绝缘测试仪的规格参考如下:
Samples to be measured 1、Mono- and multi-crystalline wafers
2、Square or pseudo square
3、Textured or non-textured surface
4、Diffused layer (n+p or p+n)
5、Wafers without contacts, cells with contacts
6、Edge-isolated
Wafer size 100 … 156 mm
Measurements Testing of edge isolation resistance by 2-point probing
Sample preparation Wafers after diffusion and edge isolation
measured area Whole wafer
Measurement time App. 5 sec. per wafer
System dimensions
(W x H x D) 220mm x 150mm x 300mm (ISO-TEST unit)
90mm x 50mm x 110mm (Multimeter)
200mm x 30mm x 110mm (Switch)