标题: 高功率紫外超短激光脉冲光束质量研究 [打印本页] 作者: hcl 时间: 2015-7-9 21:28 标题: 高功率紫外超短激光脉冲光束质量研究 高功率紫外超短激光脉冲光束质量研究
Beam Quality Research of High Power Ultraviolet Ultrashort Laser Pulse System
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作 者：苏恒毅 兰小飞 张骥 王雷剑 路建新 汤秀章
SU Heng-yi, LAN Xiao-fei, ZHANG Ji, WANG Lei-jian, LU Jian-xin, TANG Xiu-zhang （China Institute of Atomic Energy, P. O. Box 275-7, Beijing 102413, China）
机构地区：中国原子能科学研究院核技术应用研究所,北京102413
出 处：《原子能科学技术》 EI CSCD 2015年第49卷第2期 230-233页,共4页
Atomic Energy Science and Technology
基 金：973计划资助项目（2011CB808104）
摘 要：通过搭建传输和聚焦光学系统,采用CCD相机测量了高功率紫外超短脉冲激光系统的光束质量参数,如紫外种子光及其经过KrF准分子激光器放大后的焦斑光强空间分布、焦斑尺寸及极限衍射倍数β。结果表明,紫外种子光光束质量良好,β接近于1。经放大后,光束质量劣化,β达到6左右。经分析,光学元件的表面缺陷可能是导致光束质量下降的主要因素。
By means of building transmitting and focusing optical system,the beam quality of high power ultraviolet ultrashort laser pulse system was researched by using a CCD camera.Relevant parameters obtained from the measurement are the spatial intensity distribution,the size of focal spot and beam qualityβ-factor of the ultraviolet seed laser and the amplified pulse after its amplification by a KrF laser system.The result shows that the beam quality of the ultraviolet seed laser beam is good.β-factor is closed to 1.After amplification the beam quality worsens andβ-factor increases to about 6.Through analysis,surface defects of optical elements may be the major factor which leads to the degradation of the laser beam quality.
关键词：超短脉冲 KrF激光 光束质量评价
ultrashort pulse ; KrF laser ; beam quality evaluation ;
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