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Measurement Features 测量特征 |
FilmTek™ 1000 |
FilmTek™ 1500 |
FilmTek™ 2000 |
FilmTek™ 3000 |
FilmTek™ 2000SE |
FilmTek™ 4000 |
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Index of Refraction折射指数 (at 2µm thickness) |
±0.005 |
±0.005 |
±0.002 |
±0.002 |
±0.0002 |
±0.00002 |
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Thickness Measurement Range 厚度测量范围 |
10nm-150mm |
10nm-150mm |
5nm-150mm |
5nm-150mm |
1Å-150mm |
3nm-350mm |
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Maximum Spectral Range 最大光谱范围 |
380-1000nm |
380-1000nm |
190-1700nm |
190-1700nm |
190-1700nm |
190-1700nm |
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Standard Spectral Range 标准光谱范围 |
380-1000nm |
380-1000nm |
240-860nm |
240-860nm |
240-1000nm |
380-1000nm |
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Reflection反射测量 |
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Transmission透射测量 |
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Optional Spectroscopic Ellipsometry可选择的光谱椭圆偏光法测量 |
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Power Spectral Density 功率谱密度测量 |
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Multi-angle Measurements (DPSD) 多角度测量 |
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Both TE TM Components of Index |
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Multi-layer thickness 多层厚度测量 |
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Index of Refraction 折射系数测量 |
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Extinction (absorption) Coefficient消光(吸收)系数 |
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Energy band gap 能量带隙测量 |
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Composition成分测量 |
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Crystallinity晶状测量 |
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Inhomogeneous Layers 非均匀层测量 |
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Surface Roughness 表面粗糙度测量 |
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