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人反对'"><i><img src="static/image/common/rec_subtract.gif" alt="反对" />反对<span id="recommendv_subtract">0</span></i></a> </div> </td> <td valign="top" class="album_side_r"> <div class="album_side"> <div class="hm mtn mbn"> <a href="http://club.oecr.com/space-uid-56952.html" target="_blank" class="xi2"><img src="http://www.oecr.com/uc_server/avatar.php?uid=56952&size=small" /></a> <span class="tit_author"> <a href="http://club.oecr.com/space-uid-56952.html">ferry</a> </span> </div> <div class="date"><span>发布时间:</span> 2009-4-29 22:48</div> <div class="album_info"> <h3>正文摘要: </h3> <p>现有一国产1100机器，行星架结构，故厂家把烘烤设为下烘烤式，溴（碘）钨灯加热方式。 现在发现一很大问题，当烘烤灯工作，调功器工作时，对晶控影响很大，表现在速率方面就是沉积速率不稳定，上下波动挺大，整个速 ...</p> </div> </div> </td> </tr> </table> </div> </div> <div class="bm vw pl" id="comment"> <div class="bm_h cl"> <h2>回复</h2> </div> <div class="bm_c"> <div id="postlistreply" class="xld xlda mbm"><div id="post_new" class="viewthread_table" style="display: none"></div></div><div id="post_669493" class="xld xlda mbm"><dl class="bbda cl"> <dd class="m avt"><a href="http://club.oecr.com/space-uid-24195.html"><img src="http://www.oecr.com/uc_server/avatar.php?uid=24195&size=small" /></a></dd> <dt> <span class="y xw0"> </span> <a href="http://club.oecr.com/space-uid-24195.html" target="_blank" class="xi2">snebur</a><em id="author_669493"> 发表于</em> <span class="xg1 xw0">2010-9-16 12:01:27</span> </dt> <dd class="z"><div class="pcb"> <div class="t_fsz"> <table cellspacing="0" cellpadding="0"><tr><td class="t_f" id="postmessage_669493"> 请注意晶控探头是否可烘烤类型的？也就是要有水冷的，否则不会稳定。</td></tr></table> </div> <div id="comment_669493" class="cm"> </div> <div id="post_rate_div_669493"></div> </div> </dd> </dl> </div> <div id="post_669471" class="xld xlda mbm"><dl class="bbda cl"> <dd class="m avt"><a href="http://club.oecr.com/space-uid-67675.html"><img src="http://www.oecr.com/uc_server/avatar.php?uid=67675&size=small" /></a></dd> <dt> <span class="y xw0"> </span> <a href="http://club.oecr.com/space-uid-67675.html" target="_blank" class="xi2">altera</a><em id="author_669471"> 发表于</em> <span class="xg1 xw0">2010-9-16 11:11:16</span> </dt> <dd class="z"><div class="pcb"> <div class="t_fsz"> <table cellspacing="0" cellpadding="0"><tr><td class="t_f" id="postmessage_669471"> 可能是温度的影响，或者是可控硅干扰．</td></tr></table> </div> <div id="comment_669471" class="cm"> </div> <div id="post_rate_div_669471"></div> </div> </dd> </dl> </div> <div id="post_627614" class="xld xlda mbm"><dl class="bbda cl"> <dd class="m avt"><a href="http://club.oecr.com/space-uid-81343.html"><img src="http://www.oecr.com/uc_server/avatar.php?uid=81343&size=small" /></a></dd> <dt> <span class="y xw0"> </span> <a href="http://club.oecr.com/space-uid-81343.html" target="_blank" class="xi2">苏州膜头</a><em id="author_627614"> 发表于</em> <span class="xg1 xw0">2010-2-3 17:27:55</span> </dt> <dd class="z"><div class="pcb"> <div class="t_fsz"> <table cellspacing="0" cellpadding="0"><tr><td class="t_f" id="postmessage_627614"> <strong>回复 <a href="http://bbs.oecr.com/redirect.php?goto=findpost&pid=627498&ptid=86326" target="_blank">49#</a> <i>sgh920</i> </strong><br /> <br /> 我也是，52 68 140 150 160 190 205 400 种类多品种齐的反光碗。<br /> 顺便还做滤光片，红外截止之类的。<br /> 以后要多交流啊。。。。。</td></tr></table> </div> <div id="comment_627614" class="cm"> </div> <div id="post_rate_div_627614"></div> </div> </dd> </dl> </div> <div id="post_627602" class="xld xlda mbm"><dl class="bbda cl"> <dd class="m avt"><a href="http://club.oecr.com/space-uid-25284.html"><img src="http://www.oecr.com/uc_server/avatar.php?uid=25284&size=small" /></a></dd> <dt> <span class="y xw0"> </span> <a href="http://club.oecr.com/space-uid-25284.html" target="_blank" class="xi2">tfc</a><em id="author_627602"> 发表于</em> <span class="xg1 xw0">2010-2-3 16:43:05</span> </dt> <dd class="z"><div class="pcb"> <div class="t_fsz"> <table cellspacing="0" cellpadding="0"><tr><td class="t_f" id="postmessage_627602"> <div class="quote"><blockquote>回复 tfc <br /> 最后还是把工装给改成帽形架了，其实上面所提的好多方面，都进行过调整，但收效均不大。<br /> 最后 ...<br /> <font size="2"><font color="#999999">ferry 发表于 2010-1-26 16:16</font> <a href="http://bbs.oecr.com/redirect.php?goto=findpost&pid=625954&ptid=86326" target="_blank"><img id="aimg_pTIWn" onclick="zoom(this, this.src, 0, 0, 0)" class="zoom" file="static/image/common/back.gif" onmouseover="img_onmouseoverfunc(this)" lazyloadthumb="1" border="0" alt="" /></a></font></blockquote></div><br /> MDC里面有三个参数是调整速率变化值的,可能没有调好(不要用说明书的值).<br /> 其次,你的探头离蒸发源太远(相对蒸发能力),<br /> 另外,是没有足够的有效修正.<br /> 这些问题有些厂家也是一头雾水<br /> .再就是温控的可控硅质量(或没有用它?)<br /> 猜机器是"类似X庆"出品?<br /> -------我不是机器厂的</td></tr></table> </div> <div id="comment_627602" class="cm"> </div> <div id="post_rate_div_627602"></div> </div> </dd> </dl> <script type="text/javascript" reload="1"> aimgcount[627602] = ['pTIWn']; attachimggroup(627602); </script> </div> <div id="post_627498" class="xld xlda mbm"><dl class="bbda cl"> <dd class="m avt"><a href="http://club.oecr.com/space-uid-105470.html"><img src="http://www.oecr.com/uc_server/avatar.php?uid=105470&size=small" /></a></dd> <dt> <span class="y xw0"> </span> <a href="http://club.oecr.com/space-uid-105470.html" target="_blank" class="xi2">sgh920</a><em id="author_627498"> 发表于</em> <span class="xg1 xw0">2010-2-2 23:55:50</span> </dt> <dd class="z"><div class="pcb"> <div class="t_fsz"> <table cellspacing="0" cellpadding="0"><tr><td class="t_f" id="postmessage_627498"> <strong>回复 <a href="http://bbs.oecr.com/redirect.php?goto=findpost&pid=627056&ptid=86326" target="_blank">47#</a> <i>苏州膜头</i> </strong><br /> <br /> <br /> 做反光碗的 兄台做什么的？</td></tr></table> </div> <div id="comment_627498" class="cm"> </div> <div id="post_rate_div_627498"></div> </div> </dd> </dl> </div> <div id="post_627175" class="xld xlda mbm"><dl class="bbda cl"> <dd class="m avt"><a href="http://club.oecr.com/space-uid-42611.html"><img src="http://www.oecr.com/uc_server/avatar.php?uid=42611&size=small" /></a></dd> <dt> <span class="y xw0"> </span> <a href="http://club.oecr.com/space-uid-42611.html" target="_blank" class="xi2">LILISRLHJ</a><em id="author_627175"> 发表于</em> <span class="xg1 xw0">2010-2-1 00:45:28</span> </dt> <dd class="z"><div class="pcb"> <div class="t_fsz"> <table cellspacing="0" cellpadding="0"><tr><td class="t_f" id="postmessage_627175"> 我想您的360膜厚控制仪应该确定是ok状态，只有速率不稳，大多情况是电/磁屏蔽方面的问题，主要检查一下接线入真空室接口的地方的耐压问题，最好是做陶瓷的；二是检查一下你的加热调功器。变压器的稳定状况，尽量减少电流脉冲现象。希望以上能对您有所帮助！实在不行的话，调整一下晶控系统（反馈计算）的周期时间（period），调到最大值1s,或是其他。</td></tr></table> </div> <div id="comment_627175" class="cm"> </div> <div id="post_rate_div_627175"></div> </div> </dd> </dl> </div> <div id="post_627056" class="xld xlda mbm"><dl class="bbda cl"> <dd class="m avt"><a href="http://club.oecr.com/space-uid-81343.html"><img src="http://www.oecr.com/uc_server/avatar.php?uid=81343&size=small" /></a></dd> <dt> <span class="y xw0"> </span> <a href="http://club.oecr.com/space-uid-81343.html" target="_blank" class="xi2">苏州膜头</a><em id="author_627056"> 发表于</em> <span class="xg1 xw0">2010-1-30 19:56:18</span> </dt> <dd class="z"><div class="pcb"> <div class="t_fsz"> <table cellspacing="0" cellpadding="0"><tr><td class="t_f" id="postmessage_627056"> <strong>回复 <a href="http://bbs.oecr.com/redirect.php?goto=findpost&pid=626316&ptid=86326" target="_blank">46#</a> <i>sgh920</i> </strong><br /> <br /> 吉林的苹果：<br /> 你做什么产品啊？？？？？</td></tr></table> </div> <div id="comment_627056" class="cm"> </div> <div id="post_rate_div_627056"></div> </div> </dd> </dl> </div> <div id="post_626316" class="xld xlda mbm"><dl class="bbda cl"> <dd class="m avt"><a href="http://club.oecr.com/space-uid-105470.html"><img src="http://www.oecr.com/uc_server/avatar.php?uid=105470&size=small" /></a></dd> <dt> <span class="y xw0"> </span> <a href="http://club.oecr.com/space-uid-105470.html" target="_blank" class="xi2">sgh920</a><em id="author_626316"> 发表于</em> <span class="xg1 xw0">2010-1-27 18:21:29</span> </dt> <dd class="z"><div class="pcb"> <div class="t_fsz"> <table cellspacing="0" cellpadding="0"><tr><td class="t_f" id="postmessage_626316"> 来学习了 呵呵 我们的机器在度第一层时也那样 但后面的就好了 不知为什么？</td></tr></table> </div> <div id="comment_626316" class="cm"> </div> <div id="post_rate_div_626316"></div> </div> </dd> </dl> </div> <div id="post_626015" class="xld xlda mbm"><dl class="bbda cl"> <dd class="m avt"><a href="http://club.oecr.com/space-uid-81343.html"><img src="http://www.oecr.com/uc_server/avatar.php?uid=81343&size=small" /></a></dd> <dt> <span class="y xw0"> </span> <a href="http://club.oecr.com/space-uid-81343.html" target="_blank" class="xi2">苏州膜头</a><em id="author_626015"> 发表于</em> <span class="xg1 xw0">2010-1-26 19:32:12</span> </dt> <dd class="z"><div class="pcb"> <div class="t_fsz"> <table cellspacing="0" cellpadding="0"><tr><td class="t_f" id="postmessage_626015"> <strong>回复 <a href="http://bbs.oecr.com/redirect.php?goto=findpost&pid=625954&ptid=86326" target="_blank">44#</a> <i>ferry</i> </strong><br /> <br /> 改成帽形架还不行？？？<br /> 你的烘烤由plc控制？？应该由调功器pid控制吧。<br /> 稀奇了，你的温度有多高啊？<br /> 哪里四不象了？这样的配置用的人太多了。挺好用啊！就是均匀性差点，装料少点。</td></tr></table> </div> <div id="comment_626015" class="cm"> </div> <div id="post_rate_div_626015"></div> </div> </dd> </dl> </div> <div id="post_625954" class="xld xlda mbm"><dl class="bbda cl"> <dd class="m avt"><a href="http://club.oecr.com/space-uid-56952.html"><img src="http://www.oecr.com/uc_server/avatar.php?uid=56952&size=small" /></a></dd> <dt> <span class="y xw0"> </span> <a href="http://club.oecr.com/space-uid-56952.html" target="_blank" class="xi2">ferry</a><em id="author_625954"> 发表于</em> <span class="xg1 xw0">2010-1-26 16:16:03</span> </dt> <dd class="z"><div class="pcb"> <div class="t_fsz"> <table cellspacing="0" cellpadding="0"><tr><td class="t_f" id="postmessage_625954"> <strong>回复 <a href="http://bbs.oecr.com/redirect.php?goto=findpost&pid=613293&ptid=86326" target="_blank">42#</a> <i>tfc</i> </strong><br /> 最后还是把工装给改成帽形架了，其实上面所提的好多方面，都进行过调整，但收效均不大。<br /> 最后措施是把烘烤的控制不再经由PLC给出，而是指令直接给出，问题算是解决了，但总感觉下烘烤问题还是很多，机器现在就像个四不像，帽形架，下烘烤，这配置，估计没有几个这样干的。<br /> 温度的均匀性和可控性不是很好，导致现在成膜区域均匀性不好，整个真空室温度上下偏差很大，考虑到观察窗口的耐温性，还不敢加太高的温度。<br /> 不知兄台有何别的看法，不妨说来听听，让大家也都长长见识。</td></tr></table> </div> <div id="comment_625954" class="cm"> </div> <div id="post_rate_div_625954"></div> </div> </dd> </dl> </div> <div id="post_622334" class="xld xlda mbm"><dl class="bbda cl"> <dd class="m avt"><a href="http://club.oecr.com/space-uid-103006.html"><img src="http://www.oecr.com/uc_server/avatar.php?uid=103006&size=small" /></a></dd> <dt> <span class="y xw0"> </span> <a href="http://club.oecr.com/space-uid-103006.html" target="_blank" class="xi2">yuyu177</a><em id="author_622334"> 发表于</em> <span class="xg1 xw0">2010-1-11 17:42:46</span> </dt> <dd class="z"><div class="pcb"> <div class="t_fsz"> <table cellspacing="0" cellpadding="0"><tr><td class="t_f" id="postmessage_622334"> 呵呵 学到不少。。。。</td></tr></table> </div> <div 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