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NV（ASML）公司指出，利用气帘式喷嘴能够广泛满足晶圆表面的疎水性及亲水性要求，并表示作为液浸课题的缺陷问题已经降至8个/晶圆以下，而且还克服了汽化热的影响，从而使得覆盖精度得以提高。关于缺陷问题，该公司就液浸特有现象的发生原因，以及水与光刻胶之间的相互作用发表了自己的看法。投影光学系统方面，介绍了NA1.2的串联式反射折射型光学系统的实际情况，将来有望达到NA1.35。 </p><p>尼康根据色散补偿的优势，介绍了NA1.3的反射折射型光学光学系统的设计概要。唯一的问题就是光学系统的<a href="http://opticalfilm.oecr.com" target="_blank" class="relatedlink">镀膜</a>处理，但可通过在镜片部分采用等比例结构进行补偿。同时还宣布，在串联式载物台结构中，400mm/秒的扫描速度在缺陷、覆盖和对焦精度方面就能达到足够的性能。该公司表示，尤其是利用HMDS覆盖晶圆斜面部分，就能抑制因边缘部分发生剥落而导致微粒的产生。 </p><p>佳能表示在曝光过程中曝光设备会逐步粘上灰尘，同时还谈到了设备除尘的可能性。接着还表示，在100～500mm/秒的载物台扫描速度下，缺陷数量将保持在10个/晶圆的水平下。各曝光设备厂商都肯定了设备除尘的必要性，它已经成为液浸技术必须的功能。 </p><p>同时，作为设备用户，东芝、NEC电子以及荷兰NXP<a href="http://sensor.oecr.com" target="_blank" class="relatedlink">半导体</a>等公司公布的数据则肯定了曝光设备厂商上述发言的正确性，表明了上面所讲到的工艺与设备相融合的重要性。除此之外，会上还提到了针对新一代曝光设备的双图案分析（比利时IMEC公司），以及适用于液浸处理的新光刻胶以及顶涂层方案。</p><p>原文网址：<a href="http://china.nikkeibp.com.cn/china/news/edit/semi200610060125.html">http://china.nikkeibp.com.cn/china/news/edit/semi200610060125.html</a></p></td></tr></table> </div> <div 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