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class="plhin" summary="pid682087" cellspacing="0" cellpadding="0"> <tr> <td class="pls" rowspan="2"> <div id="favatar682087" class="pls favatar"> <a name="lastpost"></a><div class="pi"> <div class="authi"><a href="http://club.oecr.com/space-uid-78278.html" target="_blank" class="xw1" style="color: #00FF99">owenchang</a> </div> </div> <div class="p_pop blk bui card_gender_" id="userinfo682087" style="display: none; margin-top: -11px;"> <div class="m z"> <div id="userinfo682087_ma"></div> </div> <div class="i y"> <div> <strong><a href="http://club.oecr.com/space-uid-78278.html" target="_blank" class="xi2" style="color: #00FF99">owenchang</a></strong> <em>当前离线</em> </div><dl class="cl"> <dt>积分</dt><dd><a href="http://club.oecr.com/home.php?mod=space&uid=78278&do=profile" target="_blank" class="xi2">45</a></dd> </dl><div class="imicn"> <a href="http://club.oecr.com/home.php?mod=space&uid=78278&do=profile" target="_blank" title="查看详细资料"><img src="static/image/common/userinfo.gif" 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href="http://bbs.oecr.com/forum.php?mod=viewthread&tid=112403&extra=&ordertype=1" class="show">倒序浏览</a> <span class="pipe show">|</span><a href="javascript:;" onclick="readmode($('thread_subject').innerHTML, 682087);" class="show">阅读模式</a> </div> </div> </div><div class="pct"><style type="text/css">.pcb{margin-right:0}</style><div class="pcb"> <div class="t_fsz"> <table cellspacing="0" cellpadding="0"><tr><td class="t_f" id="postmessage_682087"> 德国Roth & Rau MicroSystems GmbH是提供将等离子体（Plasma）和离子束（ion beam）技术应用于<a href="http://opticalfilm.oecr.com" target="_blank" class="relatedlink">薄膜</a>和表面处理的<a href="http://optics.oecr.com" target="_blank" class="relatedlink">加工</a>设备及零部件的供应商。公司<a href="http://b.oecr.com/sell" target="_blank" class="relatedlink">产品</a>广泛应用于多种工业领域，其中包括可为<a href="http://solar.oecr.com" target="_blank" class="relatedlink">太阳能</a>电池硅片进行边缘绝缘处理的等离子体刻蚀系统，应用于<a href="http://solar.oecr.com" target="_blank" class="relatedlink">光伏</a>领域中的其它干法刻蚀设备，以及适用于研究和开发过程所需要的各种等离子体<a href="http://optics.oecr.com" target="_blank" class="relatedlink">工艺</a>设备。基于公司在等离子体领域长期积累的经验和对工艺过程的全面的了解，Roth & Rau公司还可提供包括等离子体源和离子束源在内的，针对不同工业领域中特殊表面处理、<a href="http://opticalfilm.oecr.com" target="_blank" class="relatedlink">镀膜</a>、等离子体及离子束加工等方向的工艺设备系统<br /> <br /> IonSys<br /> Roth&Rau公司在现代高精密薄膜沉积和表面加工处理技术中，尤其是离子束加工方向树立了新的质量标准体系。<br /> 应用：<br /> 离子束刻蚀：<br /> -金属薄膜离子束铣磨（Au，Pd，Ru，Ta，Ti等），特别适用于MEMS工艺应用<br /> -复杂的多层膜结构刻蚀（GMR，TMR，BAW）<br /> -变角度刻蚀<br /> <br /> 离子束沉积：<br /> -沉积复杂多层膜：<br /> -X射线薄膜以及梯度薄膜（Goebel镜）<br /> -EUV镜<br /> -UV膜 UV滤光片<br /> -磁阻<a href="http://sensor.oecr.com" target="_blank" class="relatedlink">传感</a>器（GMR,TMR,SQIDs）<br /> <br /> IonScan<br /> Roth&Rau公司的IonScan系统为高精度光学薄膜表面以及<a href="http://sensor.oecr.com" target="_blank" class="relatedlink">半导体</a>技术提供精准的修正。通过准确控制离子束的位置、能量以及速率，以及集成的在线面型扫面系统，可以对薄膜或者<a href="http://material.oecr.com" target="_blank" class="relatedlink">晶体</a>表面进行<a href="http://material.oecr.com" target="_blank" class="relatedlink">纳米</a>级的修正。<br /> 应用：<br /> 半导体技术（薄膜表面修正）<br /> -表面声波滤光片（SAW）和体声波滤光片（BAW）薄膜表面修正<br /> -化学<a href="http://machine.oecr.com" target="_blank" class="relatedlink">机械</a>研磨(CMP)后表面修正<br /> -MEMS器件抛光表面瑕疵去除<br /> 光学生产（IBF）<br /> -制作和修正大表面光栅<br /> -高精密光学元件表面修整<br /> <br /> MicroSys<br /> Roth&Rau公司的MicroSys系统为单晶体反应离子刻蚀和PECVD提供先进的设备。<br /> 应用：<br /> 反应离子刻蚀（RIE）<br /> -去除掩膜<br /> -高速金属溅射刻蚀<br /> -Si，SiO2，Si3N4的氟化刻蚀<br /> -Ⅲ/Ⅴ合成传感器和金属的氯化物刻蚀<br /> PECVD<br /> -半导体、MEMS、传感器工艺中Si, Si，SiO2，Si3N4以及SiC的沉积<br /> -扩散隔膜、封装以及DLC薄膜的沉积<br /> -有机聚合物（HMDSO,HMDSN,TEOS等）<br /> <br /> 等离子/离子源:<br /> <br /> 1柱形等离子源<br /> 平行<a href="http://display.oecr.com" target="_blank" class="relatedlink">平板</a>RF等离子源<br /> 微波等离子源<br /> ICP高频等离子源<br /> 2线性等离子源<br /> 3柱形离子束源<br /> Kaufman离子束源<br /> RF离子束源<br /> 微波离子束源<br /> 4 线性宽离子束源<br /> <br /> 其他：<br /> Roth&Rau公司还可以根据客户需求提供不同的生产系统，包括磁控溅射镀膜设备，功能膜，硬膜的沉积等等。<br /> <br /> 有兴趣请联系北京欧唐科技发展有限公司<br /> TEL：010-62527843<br /> E-mail：<a href="mailto:sean@opturn.com">sean@opturn.com</a><br /> 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