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class="t_fsz"> <table cellspacing="0" cellpadding="0"><tr><td class="t_f" id="postmessage_113335"> [25]谢谢！！处于起步前进中的远紫外光刻技术<br /> Aaron Hand, Semiconductor International责任编辑 <br /> <br /> 如果人们对EUV(远紫外光刻技术)是否能投入生产中去还持有任何怀疑的话，EUV的开发者们则根本没有顾虑到这种怀疑。近来，不断有关于这种下一代的重要的金娃娃样的光刻技术方面进展的报道。 法国CEA-LETI公司已经完成了它的EUV样机(BEL)曝光设备的安装调试工作，将于12月的早些时候发出“第一束光”。据LETI硅技术部光刻技术小组负责人Serge Tedesco介绍，在α设备使用之前，欧洲的第一台EUV曝光设备BEL将在2003年到2005年用于MEDEA+项目研究。他说，该设备将主要用于感光胶<a href="http://optics.oecr.com" target="_blank" class="relatedlink">工艺</a>的早期开发工作，也将用于评估掩膜版技术、光学系统和光源寿命的研究。 德国英飞凌科技（Infineon Technologies）公司去年11月宣布他们已成功地用EUV光刻技术在硅片上的薄绝缘<a href="http://opticalfilm.oecr.com" target="_blank" class="relatedlink">薄膜</a>上爆光出了图形（如图所示）。在早期EUV曝光系统上用Shipley公司生产的120nm厚的感光胶嚗出了图形，研究人员还把嚗出来的图形转移到胶层下面的薄绝缘薄膜上，分辩率并没有任何损失。圆片的刻蚀是在Sandia 国家实验室进行的。 这些凹槽，是用等离子腐蚀工艺进行刻蚀的，刻蚀宽度在60nm以下，刻蚀深度为160nm。研究人员说，这样的爆光尺寸可以作为制作65nm水平的微处理器凹槽用。研究人员还解释道，以前，这种结构仅能用<a href="http://electronic.oecr.com" target="_blank" class="relatedlink">电子</a>束直写光刻设备进行制作，但这种技术的生产能力受到限制。 也是在去年11月，德国Carl Zeiss SMT公司宣布英国牛津Exitech 实验室定购了两台微曝光设备Micro Exposure Tools (MET)，还有一台供EUV分步重复光刻机用的光学系统。EUV光刻机的最终使用者是International SEMATECH公司和一家不怎么出名但却是非常重要的的芯片制造商。这种双反射镜系统的数值孔径为0.3，设计要求要达到的分辨率为50nm，图像区域为 0.6 × 0.2 mm。Zeiss在今年早些时候进行了MET的第一次<a href="http://opticaltest.oecr.com" target="_blank" class="relatedlink">测试</a>，首次试验就得到了50nm的分辨率。 <br /> 用EUV光刻技术刚刻蚀出来的样品扫描电镜照片，样品上的感光胶还没有去除掉。最窄的空间间隔是60nm，剖面高度是160nm（来源：Infineon）<br /> 眼下，德国SIGMA-C公司开发出了一种<a href="http://opticaldesign.oecr.com" target="_blank" class="relatedlink">软件</a><a href="http://b.oecr.com/sell" target="_blank" class="relatedlink">产品</a>，可用于模拟EUV光刻技术的每一个工艺步骤。SOLID-EUV可以协助研发工作确定掩膜版、掩膜衬底版和透镜的性能指标，从而使研发变得容易。该软件能够通过对曝光过程的空气中的图像和在硅片表面爆过光的感光胶图形的分析，使用户能够对一个预先设定的工艺流程的有效性进行评估。 并且，ISMT 和日本Lasertec公司宣布，他们愿意在2004年10月底之前，合作开发EUVL掩膜衬底版/空白掩膜版检测系统。协议倡导使用Lasertec公司的多<a href="http://laser.oecr.com" target="_blank" class="relatedlink">激光</a>束共聚焦技术来开发掩膜版的检测设备。ISMT的掩膜战略项目经理Kurt R. Kimmel在一份声明中说道：“空白掩膜层检测技术是EUVL开发技术中的关键环节，实际上，最近国际EUVL<a href="http://bbs.oecr.com" target="_blank" class="relatedlink">论坛</a>的参与者都认为多层空白掩模的生产，包括检测，是EUV光刻技术走向市场商业化所面临的最紧迫的事情之一。” 去年10月份，被推选参加在Dallas举办的首届EUV光刻技术国际研讨会的光刻专家们，被要求就有关EUV技术面临的最关键问题进行选题。这一研讨会是由ISMT、欧洲MEDEA+和日本的ASET联合举办的。在这一研讨会上，专家们花了两天半以上的时间进行讨论，最后得出结论一致认为：除了需要彻底解决的重大技术问题以外，EUV技术首要的问题是真正地进入商业化运营，还有以下10个重大事件需要解决，按优先顺序如下： ·光源的输出功率 ·无缺陷的多层空白掩膜的制备 ·光源和光学聚光光学系统/可靠性 ·EUV光刻技术的版权成本 ·无缺陷刻有图形的掩膜版制备和商用性 ·一次光刻版防损伤保护技术 ·光路路径污染有效的控制 ·高数值孔径光学器件的制造 ·在产品高输出能力下，对一次掩膜版和投影光学器件的热管理 ·商用EUV感光胶应同时具有分辨率、灵敏度、边缘粗糙度和低放气等方面的良好性能 <a href="http://sensor.oecr.com" target="_blank" class="relatedlink">半导体</a>行业认为2007年将是EUV光刻技术发展的黄金时期。还有做很多工作要做，还要解决许多关键问题才能迎来这个时期，但开发者们好像已下定了决心要实现这一目标。 <br /> 半导体制造与封装_光刻_2003.04.30<br /> <br /> </td></tr></table> </div> <div id="comment_113335" class="cm"> </div> <div id="post_rate_div_113335"></div> </div> </div> </td></tr> <tr><td class="plc plm"> <div id="p_btn" class="mtw mbm hm cl"> <a 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