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class="pct"><style type="text/css">.pcb{margin-right:0}</style><div class="pcb"> <div class="t_fsz"> <table cellspacing="0" cellpadding="0"><tr><td class="t_f" id="postmessage_828881"> 反应离子刻蚀RIE<br /> <br /> 反应离子刻蚀：这种刻蚀过程同时兼有<a href="http://theory.oecr.com" target="_blank" class="relatedlink">物理</a>和化学两种作用。辉光放电在零点几到几十帕的低真空下进行。基片处于阴极电位，放电时的电位大部分降落在阴极附近。大量带电粒子受垂直于硅片表面的电场加速，垂直入射到硅片表面上,以较大的动量进行物理刻蚀,同时它们还与<a href="http://opticalfilm.oecr.com" target="_blank" class="relatedlink">薄膜</a>表面发生强烈的化学反应，产生化学刻蚀作用。选择合适的气体组分，不仅可以获得理想的刻蚀选择性和速度，还可以使活性基团的寿命短，这就有效地抑制了因这些基团在薄膜表面附近的扩散所能造成的侧向反应，大大提高了刻蚀的各向异性特性。反应离子刻蚀是超大规模集成<a href="http://electronic.oecr.com" target="_blank" class="relatedlink">电路</a><a href="http://optics.oecr.com" target="_blank" class="relatedlink">工艺</a>中很有发展前景的一种刻蚀方法。 <br /> <br /> <br /> 等离子体增强化学气相沉积PECVD<br /> <br /> 基于辉光放电方法的PECVD技术，能够使得反应气体在外界电磁场的激励下实现电离形成等离子体。在辉光放电的等离子体中，<a href="http://electronic.oecr.com" target="_blank" class="relatedlink">电子</a>经外电场加速后，其动能通常可达10eV甚至更高，足以破坏反应气体分子的化学键，因此，通过高能电子和反应气体分子的非弹性碰撞，就会使气体分子电离（离化）或者使其分解，产生中性原子和分子生成物。正离子受到离子层加速电场的加速与上电极碰撞，放置衬底的下电极附近也存在有一较小的离子层电场，所以衬底也受到某种程度的离子轰击。因而分解产生的中性物依扩散到达管壁和衬底。这些粒子和基团（这里把化学上是活性的中性原子和分子物都称之为基团）在漂移和扩散的过程中，由于平均自由程很短，所以都会发生离子-分子反应和基团-分子反应等过程。到达衬底并被吸附的化学活性物（主要是基团）的化学性质都很活泼，由它们之间的相互反应从而形成薄膜。<br /> <br /> 详情请参考 http://opturn.blog.sohu.com/entry/8463781/<br /> <br /> <font size="2"><font color="gray"> <img id="aimg_AdGL9" onclick="zoom(this, this.src, 0, 0, 0)" class="zoom" file="http://club.oecr.com/xwb/images/bgimg/icon_logo.png" onmouseover="img_onmouseoverfunc(this)" lazyloadthumb="1" border="0" alt="" /> 该贴已经同步到 <a href="http://ome.ac.cn/index.php?m=show&id=13108323655" target="_blank">yang1268的微博</a></font></font></td></tr></table> </div> <div id="comment_828881" class="cm"> </div> <div id="post_rate_div_828881"></div> </div> </div> </td></tr> <tr><td class="plc plm"> <div id="p_btn" class="mtw mbm hm cl"> <a 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