F数0．42大偏离量离轴非球面反射镜的光学加工

风轻扬 · 发表于 2015-7-12 17:23:44

F数0．42大偏离量离轴非球面反射镜的光学加工
Optical Manufacturing of F Number of 0.42 Large-Deviation Off-Axis Aspheric Mirror
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作　　者：李锐钢
Li Ruigang （Key Laboratory of Optical System Advanced Manufacturing Technology, Chinese Academy of Sciences, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, Jilin 130033, China）
机构地区：中国科学院长春光学精密机械与物理研究所,中国科学院光学系统先进制造技术重点实验室,吉林长春130033
出　　处：《光学学报》 EI CSCD 2014年第13期 375-380页,共6页
Acta Optica Sinica
基　　金：国家自然科学基金青年基金（51305422）
摘　　要：非球面光学元件在光学系统中的应用越来越广泛，为了提高光学系统能量收集能力，高陡度非球面光学元件常常被采用。然而，高陡度非球面光学元件的光学加工至今仍是光学制造领域内的难题之一。通过一块F数0．42的大偏离量离轴碳化硅非球面反射镜的制造实例，详细地介绍了一些重要的技术研究进展。首先是离轴非球面直接铣磨技术，与传统的铣磨最接近球面相比残余误差大大减小，估算后续光学研磨的加工周期与原来相比可以缩短2／3左右；通过对非球面方程坐标变换，大大减小了矢高差，使数控加工难度极大降低，而通过磨头沿非球面法线方向数控加工可以保证去除函数的对称性，给出了详细的磨头姿态及坐标补偿求解过程。实例最终面形精度达到均方根值0．039λ（λ为632．8nm）。
Aspherical components have been more and more widely used in optical systems. In order to enhance the ability of light collecting for the optical system, highly steep aspheres are often used. However, manufacturing of highly steep aspheres is now one of the hard work in optical engineering field. Through a manufacturing case of F number of 0.42 off-axis asphere with large asphericity, some researching progresses are introduced. The first is the milling technology for off-axis asphere, comparing with the traditional milling technology of the best fitting sphere （BFS）, the remaining asperical error is decreased greatly, and the following grinding cycle is shortened about 2/33 while decreasing the sag difference of the asphere by coordinate transforming of the equation, the difficulty of manufacturing is greatly reduced. Meanwhile, by making the small tool running along the asphere＇s normal, we can ensure the removal function＇s symmetry, and the solving procedure of the tool＇s position and coordinate＇ s compensation is given in detail. The example shows that the final asphere precision I-root-mean-square （RMS）] attains to 0. 039λ （λis 632.8 nm）.
关键词：光学制造数控加工非球面铣磨坐标变换去除函数
optical fabrication ; numerical control machining ; milling of asphere ; coordinate transforming ; removalfunction ;

[技术] F数0．42大偏离量离轴非球面反射镜的光学加工

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