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</div> <strong> <a href="http://bbs.oecr.com/thread-27201-1-1.html" id="postnum206261" onclick="setCopy(this.href, '帖子地址复制成功');return false;"> <em>1</em>楼</a> </strong> <div class="pti"> <div class="pdbt"> </div> <div class="authi"> <img class="authicn vm" id="authicon206261" src="static/image/common/online_member.gif" /> <em id="authorposton206261">发表于 2004-10-19 00:01:00</em> <span class="pipe">|</span> <a href="http://bbs.oecr.com/forum.php?mod=viewthread&tid=27201&page=1&authorid=13290" rel="nofollow">只看该作者</a> <span class="none"><img src="static/image/common/arw_r.gif" class="vm" alt="回帖奖励" /></span> <span class="pipe show">|</span><a href="http://bbs.oecr.com/forum.php?mod=viewthread&tid=27201&extra=&ordertype=1" class="show">倒序浏览</a> <span class="pipe show">|</span><a href="javascript:;" onclick="readmode($('thread_subject').innerHTML, 206261);" class="show">阅读模式</a> </div> </div> </div><div class="pct"><style type="text/css">.pcb{margin-right:0}</style><div class="pcb"> <div class="t_fsz"> <table cellspacing="0" cellpadding="0"><tr><td class="t_f" id="postmessage_206261"> <P>小弟正在做ecr，就是<a href="http://electronic.oecr.com" target="_blank" class="relatedlink">电子</a>回旋共振。</P> <P>该仪器公司有说明如下：<FONT face=Verdana>The system is designed to permit surface processing by an ECR generated plasma of up to quantity three, 2" diameter, or a single 5" wafer subject to temperature control and RF bias. Vacuum pressure in the main chamber is capable of reaching pressures less than 1x10-10m.bar with turbo-molecular pumping plus optional titanium sublimation pumping. Vacuum ports are available for diagnostic and gas introduction. </FONT></P> <P><FONT face=Verdana size=-1>The system is installed as shown on a support table with 19" electrical rack and one power distribution panel. The electrical system will require extra power with customer supplied breakefor the ECR source to supply the 1 kW 208 VAC 1 phase, 15 Amp microwave source and two magnets requiring 208 VAC 3 phase, 20 Amp and 208 VAC 3 phase, 15 Amp. Vacuum integrity via a leak test to 2x10-10 Torr 1/sec He, along with sample transfer and heating, will be demonstrated. </FONT></P> <P><FONT face=Verdana></FONT> </P> <P><FONT face=Verdana></FONT> </P> <P><b><FONT face=Verdana>不知各位大虾可有用过，若有，指点一二，不尽感激。</FONT></b></P></td></tr></table> </div> <div id="comment_206261" class="cm"> </div> <div id="post_rate_div_206261"></div> </div> </div> </td></tr> <tr><td class="plc plm"> <div id="p_btn" class="mtw mbm hm cl"> <a href="http://club.oecr.com/home.php?mod=spacecp&ac=favorite&type=thread&id=27201&formhash=f782245d" id="k_favorite" onclick="showWindow(this.id, this.href, 'get', 0);" onmouseover="this.title = $('favoritenumber').innerHTML + ' 人收藏'" title="收藏本帖"><i><img src="static/image/common/fav.gif" alt="收藏" />收藏<span id="favoritenumber" style="display:none">0</span></i></a> <a class="followp" href="home.php?mod=spacecp&ac=follow&op=relay&tid=27201&from=forum" onclick="showWindow('relaythread', this.href, 'get', 0);" title="转播求扩散"><i><img 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