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<div id="favatar536239" class="pls favatar"> <div class="pi"> <div class="authi"><a href="http://club.oecr.com/space-uid-87459.html" target="_blank" class="xw1" style="color: #0033CC">beijingec</a> </div> </div> <div class="p_pop blk bui card_gender_" id="userinfo536239" style="display: none; margin-top: -11px;"> <div class="m z"> <div id="userinfo536239_ma"></div> </div> <div class="i y"> <div> <strong><a href="http://club.oecr.com/space-uid-87459.html" target="_blank" class="xi2" style="color: #0033CC">beijingec</a></strong> <em>当前离线</em> </div><dl class="cl"> <dt>积分</dt><dd><a href="http://club.oecr.com/home.php?mod=space&uid=87459&do=profile" target="_blank" class="xi2">62</a></dd> </dl><div class="imicn"> <a href="http://club.oecr.com/home.php?mod=space&uid=87459&do=profile" target="_blank" title="查看详细资料"><img src="static/image/common/userinfo.gif" alt="查看详细资料" /></a> <a href="http://club.oecr.com/home.php?mod=magic&mid=showip&idtype=user&id=beijingec" id="a_showip_li_536239" 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class="show">阅读模式</a> </div> </div> </div><div class="pct"><style type="text/css">.pcb{margin-right:0}</style><div class="pcb"> <div class="t_fsz"> <table cellspacing="0" cellpadding="0"><tr><td class="t_f" id="postmessage_536239"> <i class="pstatus"> 本帖最后由 beijingec 于 2009-3-26 11:40 编辑 </i><br /> <br /> <img id="aimg_Tq8mN" onclick="zoom(this, this.src, 0, 0, 0)" class="zoom" width="98" height="126" file="http://www.cn.kmac.to/upload/CR-2vOWcBQMQR.gif" onmouseover="img_onmouseoverfunc(this)" onclick="zoom(this)" style="cursor:pointer" border="0" alt="" /> <br /> 设备简介 <br /> 1.特点 <br /> 操作简单易懂 <br /> 非接触式、非破坏式<a href="http://opticaltest.oecr.com" target="_blank" class="relatedlink">测量</a>方法<br /> 可同时测量多层膜厚度 <br /> 实时测量 <br /> 再现性好（精度可达 1A 以下） <br /> 厚度及光学常数（折射率、消光系 数） <br /> 一次最多 3 层<a href="http://opticalfilm.oecr.com" target="_blank" class="relatedlink">薄膜</a>测量 <br /> 测量结果制图 <br /> X-Y-Z 移动控制 <br /> CCD 影像<a href="http://display.oecr.com" target="_blank" class="relatedlink">显示</a> <br /> 自定义测量过程 <br /> 打印预览模式<br /> <br /> 2.应用领域 <br /> <a href="http://sensor.oecr.com" target="_blank" class="relatedlink">半导体</a> Poly-Si, GaAS, GaN, InP, ZnS, SiGe ... <br /> 绝缘<a href="http://material.oecr.com" target="_blank" class="relatedlink">材料</a> SiO 2 , Si 3 N 4 , TiO 2 , ITO, ZrO 2 , BTS, HfO 2 ... <br /> 聚合物 PVA, PET, PP, PR ... <br /> LCD a-Si, n+a-Si,Oxides, ITO, Cell Gap, Photoresist & Polyimide Film <br /> 光学镀层 Hardnes Coating, Anti-Reflection Coating, Filters, Packing & Functional Film ... <br /> 可纪录材料 Phtosensitive Drum, Video Head, Optical Disk ... <br /> 其它 Photoresist Film on CRT & Shadow Mask, Thin Metal Films, Laser Mirrors ... <br /> <br /> 3.可用的基片 <br /> Silicon SOI Al 2 O 3 Aluminium <br /> SOS GaAs Glass ...... <br /> <a href="http://opticaldesign.oecr.com" target="_blank" class="relatedlink">软件</a> <br /> <br /> 4.分光反射镜的工作原理 <br /> 利用可见光非接触式测量 光源与信号通道 如右图所示，钨－卤光源发出的光通过 光学显微镜入射到样片上的薄膜上，然 后从薄膜表面和基底反射的光通过入射 光纤探针内中间的一个发射光收集光纤 又入射到分光计（spectrometer）。这 个反射光由探测器里的光栅根据波长分 解后，由 CCD 转换成<a href="http://electronic.oecr.com" target="_blank" class="relatedlink">电子</a>信号，再由 A/D 转换器转换成数字信号，最后通过通讯 端口输入到电脑进行分析。 <br /> 干涉频谱 <br /> – 相干光 → 表面反射 + 薄膜 / 底层反射 = 干 涉现象 → 相长 / 相消干涉（与波长有关） <br /> <br /> 光谱拟合薄膜厚度 <br /> – 在波长范围里测量频谱的正弦波型由 薄膜厚度和 N&K 值决定 <br /> – 由拟合计算测定频谱来优化薄膜厚度 和 N&K 值 <br /> <br /> 5技术指标 <br /> 尺寸 190 x 265 x 316 mm<br /> 重量 12Kg<br /> 类型 手动的<br /> 测量样本大小 ≤ 4" <br /> 测量方法 非接触式<br /> 测量原理 反射计<br /> 特征: 测量迅速，操作简单<br /> 非接触式，非破坏方式<br /> 优秀的重复性和再现性<br /> 用户易操作界面<br /> 每个影像打印和数据保存功能<br /> 可测量多达3层<br /> 可背面反射<br /> <br /> 活动范围 150 x 120mm(70 x 50mm 移动距离)<br /> 测量范围 200Å~ 35㎛(根据膜的类型)<br /> 光斑尺寸 20㎛ 典型值<br /> 测量速度 1~2 sec./site<br /> 应用领域 聚合体: PVA, PET, PP, PR ...<br /> 电解质: <br /> 半导体: Poly-Si, GaAs, GaN, InP, ZnS...<br /> 选择 参考样品(K-MAC or KRISS or NIST) <br /> 探头类型 三目探头<br /> nosepiece Quadruple Revolving Mechanism with Inward Tilt<br /> <a href="http://light.oecr.com" target="_blank" class="relatedlink">照明</a>类型 12V 35W Halogen Lamp Built-in Control Device & Transformer<br /> <br /> 联系人: 刘先生<br /> 北京燕京电子有限公司 <br /> Beijing Yanjing Electronics co.,ltd. <br /> <br /> 地址：北京市朝阳区酒仙桥东路9号A2座西区7层 <br /> 邮编：100016 <br /> Tel: 86-10-5823-7160 <br /> Fax: 86-10-5922-2787 <br /> Msn:po663340@hotmail.com <br /> Website: <a href="http://www.beijingec.com/" target="_blank">www.beijingec.com</a> <br /> E-mail: <a href="mailto:liusp@beijingec.com">liusp@beijingec.com</a></td></tr></table> </div> <div id="comment_536239" class="cm"> </div> <div id="post_rate_div_536239"></div> </div> </div> </td></tr> <tr><td class="plc plm"> <div id="p_btn" class="mtw mbm hm cl"> <a href="http://club.oecr.com/home.php?mod=spacecp&ac=favorite&type=thread&id=84635&formhash=52f05eec" id="k_favorite" onclick="showWindow(this.id, this.href, 'get', 0);" onmouseover="this.title = $('favoritenumber').innerHTML + ' 人收藏'" title="收藏本帖"><i><img src="static/image/common/fav.gif" alt="收藏" />收藏<span id="favoritenumber" style="display:none">0</span></i></a> <a 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class="pi"> <strong> <a href="http://bbs.oecr.com/forum.php?mod=redirect&goto=findpost&ptid=84635&pid=565184" id="postnum565184" onclick="setCopy(this.href, '帖子地址复制成功');return false;"> <em>2</em>楼</a> </strong> <div class="pti"> <div class="pdbt"> </div> <div class="authi"> <img class="authicn vm" id="authicon565184" src="static/image/common/ico_lz.png" /> 楼主<span class="pipe">|</span> <em id="authorposton565184">发表于 2009-6-17 10:25:21</em> <span class="pipe">|</span> <a href="http://bbs.oecr.com/forum.php?mod=viewthread&tid=84635&page=1&authorid=87459" rel="nofollow">只看该作者</a> </div> </div> </div><div class="pct"><div class="pcb"> <div class="t_fsz"> <table cellspacing="0" cellpadding="0"><tr><td class="t_f" id="postmessage_565184"> 顶 大家需要光学薄膜测厚资料的话,可以来找我 联系我邮件:liusp@beijingec.com</td></tr></table> </div> <div id="comment_565184" class="cm"> </div> <div id="post_rate_div_565184"></div> </div> </div> </td></tr> <tr><td class="plc plm"> </td> </tr> <tr id="_postposition565184"></tr> 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