美国IRD公司,专门制造用于探测紫外、深紫外、真空极紫外和软X射线光子的探测器。IRD公司是目前唯一能够制造并商用的用于检测VUV、EUV检测的Si探测器生产厂家。可用于紫外、深紫外的探测器有两大系列:
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- UVG 系列:更加适合于130nm -1100nm 光相关的检测,可集成制定波长窄带滤光片
- SXUV系列:适用于高光通量的场合,如UV/EUV脉冲辐射、准分子激光等,脉冲能量密度超过0.1 µJ/cm2。可集成制定波长窄带滤光片。
- AXUV系列主要用软X射线、极紫外、X射线、低能离子等辐射探测。详见辐射探测系列探测器.
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| 光谱响应曲线 |
| [img=371,484 alt=]http://web.dns99.cn/com/bob21moe7/pic/1170909950.jpg[/img] |
| UVG系列技术参数(22摄氏度): |
| Sensitive Area (mm^2)
| Size (mm)
| Package Type
| Shunt Resistance (M-Ohm)
| Dark Current at 50V
| Capacitance at 0V
| Risetime (10-90%)
| UVG100
| 100
| 10 X 10
| Ceramic
| 100
| *
| 20 nF**
| 10 µSec**
| UVG300
| 330
| 22 X 15
| Plastic
| 20
| *
| 40 nF**
| 15 µSec**
| UVG20
| 20
| 5 Ø
| TO-8
| 1000
| *
| 4 nF**
| 2 µSec**
| UVG20C
| 20
| 5 Ø
| TO-8
| 1000
| *
| 4 nF**
| 2 µSec**
| UVG20BNC
| 20
| 5 Ø
| BNC
| 1000
| *
| 2 nF**
| 2 µSec**
| UVG20B
| 20
| 5 Ø
| Ceramic
| 100
| *
| 5 nF**
| 1 µSec**
| UVG20HED
| 20
| 5 Ø
| Ceramic
| 100
| *
| 5 nF**
| 1 µSec**
| UVG12
| 12
| 4 Ø
| TO-5
| 1000
| *
| 2 nF**
| 2 µSec**
| UVG10
| 10
| 10 X 1
| Ceramic
| 1000
| *
| 2 nF**
| 2 µSec**
| UVG12C
| 12
| 4 Ø
| TO-5
| 1000
| *
| 2 nF**
| 2 µSec**
| UVG5 #
| 5
| 2.5 Ø
| TO-5
| 1000
| 2 nA
| 200 pF
| < 2 nSec
| UVG5S
| 5
| 2.5 Ø
| TO-5
| 1000
| 2 nA
| 200 pF
| < 2 nSec
| UVG576
| 576
| 24 X 24
| Metal
| 10
| *
| 100 nF
| 50 µSec**
| UVGHS1 #
| .05
| .22 X .22
| SMA
| 1000
| 100 pA
| 5 pF
| .25 nSec
| UVGHS2 #
| .05
| .22 X .22
| SSMA
| 1000
| 100 pA
| 5 pF
| .25 nSec
| UVGHS3 #
| .005
| .07 X .07
| SSMA
| 1000
| 50 pA
| 15 pF
| 80 pSec
| UVGHS4 #
| .026
| .16 X .16
| SMA
| 1000
| 100 pA
| 150 pF
| 200 pSec
| UVGHS5 #
| 1
| 1 X 1
| SMA
| 1000
| 200 pA
| 400 pF
| 700 pSec
| UVGHS6 #
| .00063
| .025 X .025
| SSMA
| 1000
| 20 pA
| 15 pF
| 50 pSec
| UVGPS1
| 11 (X4)
| 7.6 Ø
| Metal
| 100
| *
| 2 nF
| 1 µSec**
| UVGPS4S
| 1.25 (X4)
| 2.5 Ø
| Metal
| 20
| *
| 0.1 nF
| 0.5 µSec
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| SXUV系列技术参数 |
| Sensitive Area (mm^2)
| Size (mm)
| Package Type
| Shunt Resistance (M-Ohm)
| Dark Current at 50V
| Capacitance at 0V
| Risetime (10-90%)
| SXUV576
| 576
| 24X24
| Metal
| 5
| *
| 1000 nF*
| 2 µSec**
| SXUV300
| 330
| 22X15
| Metal
| 10
| *
| 40 nF*
| 15 µSec**
| SXUV300C
| 330
| 22X15
| Ceramic
| 5
| *
| 40nF
| 15 µSec**
| SXUV100
| 100
| 10 X 10
| Ceramic
| 10
| *
| 20 nF**
| 10 µSec**
| SXUV100LP
| 100
| 10 X 10
| Ceramic
| 10
| *
| 20 nF**
| 10 µSec**
| SXUV100LPA
| 100
| 10 X 10
| Cermaic
| 10
| *
| 20 nF**
| 10 µSec**
| SXUV100RPD***
| 100
| 10 X 10
| Ceramic
| 10
| *
| 20 nF**
| 10 µSec**
| SXUV20
| 20
| 5.0 Ø
| TO-8
| 100
| *
| 4 nF**
| 2 µSec**
| SXUV20RPD***
| 20
| 5.0 Ø
| TO-8
| 100
| *
| 4 nF**
| 2 µSec**
| SXUV20A
| 20
| 5.0 Ø
| Ceramic
| 100
| *
| 4 nF**
| 2 µSec**
| SXUV20ARPD ***
| 20
| 5.0 Ø
| Ceramic
| 100
| *
| 4 nF**
| 2 µSec**
| SXUV20C
| 20
| 5.0 Ø
| TO-8
| 100
| *
| 4 nF**
| 2 µSec**
| SXUV20BNC
| 20
| 5.0 Ø
| BNC
| 100
| *
| 4 nF**
| 2 µSec**
| SXUV10A
| 10
| 1 X 10
| C10A
| 400
| *
| 1 nF**
| 0.6 µSec**
| SXUV5 #
| 5
| 2.5 Ø
| TO-5
| 200
| 20 nA
| 200 pF**
| < 2 µSec**
| SXUV5S#
| 5
| 2.5 Ø
| TO-5
| 200
| 20 nA
| 200 pF**
| < 2 µSec**
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