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ITO镀膜对化学钢化玻璃力学及透过性能的影响研究
Study on the Effect of ITO Film on Mechanical Properties and Transmittance of Chemical-toughened Glass
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ITO镀膜对化学钢化玻璃力学及透过性能的影响研究.pdf
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作 者:李会
Li Hui ( China construction glass and industrial glass association, Beijing, 100037 )
机构地区:中国建筑玻璃与工业玻璃协会,北京市100037
出 处:《玻璃》 2014年第41卷第8期 49-51页,共3页
Class
摘 要:锡掺杂氧化铟(InO2-SnO2,ITO)薄膜因具有良好的电学及透过性能而被广泛应用。本文以化学钢化玻璃为基体,采用磁控溅射对玻璃基体进行锡掺杂氧化铟(InO2-SnO2,ITO)薄膜的制备。研究了镀膜工艺对玻璃基体力学及透过性能的影响。研究结果表明:镀膜对玻璃强度有一定影响,随着镀膜温度的升高及时间的延长,玻璃的强度和表面应力逐渐下降。ITO薄膜的制备也对玻璃的透过性能有所影响,从92%降低至85%。虽然镀膜工艺降低了玻璃强度及透过性,但是总体影响不大。镀膜温度小于320℃,镀膜时间为1 h,对玻璃性能的影响比较小。
The film of InO2-SnO2(ITO) is widely used as its excellent electrical and optical properties.In this paper the preparation of this film with magnetron sputtering technology on chemically toughened glass was described. Study shows that the film may affect the strength of the substrate glass. The strength and surface stress of the glass gradually decrease with the increasing of coating temperature and the prolonging of coating duration. The transmittance of the glass was also affected by this film, from 92% down to 85%. It is concluded that the optimum parameters of the process is 320℃ of the temperature and 1 hour of the coating time.
关键词:化学钢化玻璃 ITO镀膜 玻璃力学性能 玻璃透过性能
chemically toughened glass ; ITO film ; mechanical property of glass ; transmittance of glass ; |
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