[求助]衄壽sputter傲跳腔恀枙

苤萊婓怢俜植岈膠傲俴珛, 翋猁酕腔岆SDC摯EMI, 儂怢妏蚚inline sputter(DC power + 棠諷) ゴ淝赽郣善珨跺恀枙, 婓傲跳腔奀緊匼第桶醱諂衄珨跺珨跺苤埴萸. 埮1-2mm湮苤,ブ甜準啞萸, 艘懂埻萸窒煦衄傲善, 筍臚綠掀〔坻窒煦猁情, 垀眕晇伎誕筏, ワ恀跪弇湮肅, 涴岆妦繫埻秪倛傖腔儸? 扂眳ゴ羶郣徹濬侔袨錶. 遜咡祥醞硌諒, 郅郅!!!

ps.價第妏蚚腔岆mitsumishi rayon腔pmma film MR200

不知显示为什么内容！

sorry, i live in Taiwan, can't type GBK font. and i don't know if you can view the Big5 font. lately, i have some trouble w/ coating Cr on PMMA. (pmma film is mitsumishi rayon MR200) when coating Cr on PMMA. there're many little spot on the substrate. (r=0.5-1mm) but it's not the white spot. it's coated, too. but thickness seems thinner than other part. can anybody tell me how to solve it?? i haven't meet this situation before. thx!!

best regards :)

您所说的点是掉膜，还是膜层起包呢，您镀膜是用那种方式，还有您的成膜温度是多少？