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class="pcb"> <div class="t_fsz"> <table cellspacing="0" cellpadding="0"><tr><td class="t_f" id="postmessage_676520"> 【01】19世纪 <a href="http://display.oecr.com" target="_blank" class="relatedlink">照相</a>制版<br /> 【02】1951年 Braun发明shadow mask（影空版）（美，RCA公司）<br /> 【03】1954年 压阻效应的发现<br /> 【04】1962年 结晶各相异性腐蚀<br /> 【05】1963年 <a href="http://sensor.oecr.com" target="_blank" class="relatedlink">半导体</a>压力计（日本丰田研究所）<br /> 【06】1967年 振动栅极<a href="http://material.oecr.com" target="_blank" class="relatedlink">晶体</a>管（美，Westinghouse公司，利用牺牲层腐蚀方法）<br /> 【07】1968年 阳极键合（美，Mallory公司）<br /> 【08】1969年 杂质浓度依存性腐蚀<br /> 【09】1970年 硅微小电极（美，Stanford，硅细微结构体）<br /> 【10】1973年 导管用硅压力<a href="http://sensor.oecr.com" target="_blank" class="relatedlink">传感</a>器（美，Stanford）<br /> 【11】1973年 微型离子敏场效应管（日本，东北大学）<br /> 【12】1975年 集成化气体色谱仪（美，Stanford，传感器+执行器）<br /> 【13】1979年 集成压力传感器（美，Michigan State University，传感器+<a href="http://electronic.oecr.com" target="_blank" class="relatedlink">电路</a>）<br /> 【14】1981年 水晶微<a href="http://machine.oecr.com" target="_blank" class="relatedlink">机械</a>（日本，横河电机）<br /> 【15】1986年 LIGA<a href="http://optics.oecr.com" target="_blank" class="relatedlink">工艺</a>（原西德原子力研究所，高深宽比细微<a href="http://optics.oecr.com" target="_blank" class="relatedlink">加工</a>技术）<br /> 【16】1986年 硅伺服型加速度传感器（瑞士，CSEM<a href="http://electronic.oecr.com" target="_blank" class="relatedlink">电子</a>与微技术中心）<br /> 【17】1986年 集成化微流量控制器（日本，东北大学，闭环控制的集成化）<br /> 【18】1987年 微型齿轮（美，University of California, Berkeley，贝尔研究所）<br /> 【19】1993 年 美国ADI公司采用该技术成功地将微型加速度计商品化，并大批量应用于汽车防撞气囊，标志着MEMS技术商品化。<br /> 其中，1987年，在加州Berkeley和MIT，一个只有人的头发丝宽度大小的微型马达通过硅微加工被成功制造出来(基于表面牺牲层技术)，这标志着微机械时代的真正到来，这一点完全可以与三十多年前的微电子技术的出现相媲美。</td></tr></table> </div> <div id="comment_676520" class="cm"> </div> <div id="post_rate_div_676520"></div> </div> </div> </td></tr> <tr><td class="plc plm"> <div id="p_btn" class="mtw mbm hm cl"> <a href="http://club.oecr.com/home.php?mod=spacecp&ac=favorite&type=thread&id=110614&formhash=76e08ff4" 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