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onclick="readmode($('thread_subject').innerHTML, 676540);" class="show">阅读模式</a> </div> </div> </div><div class="pct"><style type="text/css">.pcb{margin-right:0}</style><div class="pcb"> <div class="t_fsz"> <table cellspacing="0" cellpadding="0"><tr><td class="t_f" id="postmessage_676540"> MEMS综合目前有下列三种方法：<br /> <br /> (1)MOGA（Multi-Objective Genetic Algorithm）多目标基因算法<br /> <br /> 基因算法(GA)是一种启发式的优化方法，它的原理启迪于自然界生物进化过程，借鉴于达尔文的物竞天演、优胜劣汰、适者生存的自然选择和自然遗传的机理，其本质是一种求解问题的高效并行全局搜索方法。它能在搜索过程中自动获取和积累有关搜索空间的知识，并自适应地控制搜索过程以求得最优解。<br /> <br /> 基因算法的两大主要特点是群体搜索策略和群体中个体之间的信息相互前面交换，它实际上是模拟由个体组成的群体的整体学习过程，其中每个个体表示给定解问题搜索空间里的一个解点。GA从任一初始化的群体出发，通过随机选择（使群体中优秀的个体有更多的机会传给下一代），交叉（体现了自然界中群体内个体之间的信息交换）和变异（在群体中引入新的变种，确保群体中信息的多样性）等遗传操作，使群体一代一代地进化到搜索空间中越来越好的区域，直至到达最优解点。<br /> <br /> 基因算法对于实现自动器件综合很有效，基因算法有着高精度的全局随机优化方法（Goldberg,1989）。它具有普遍性，可以应用于任何有非常明确目标功能的问题。基因算法的另外一个优点就是可以能够同时精确搜索到多问题多目标。多目标基因算法（MOGA）已经广泛应用于工程优化设计领域。<br /> <br /> MOGA是用进化的方法来达到在一个群体中优化结果。首先给定一个高级器件行为描述，最初的参数随机产生，由一些有效的元件组成，如锚区、梁、静电带和疏状齿。每种设计都要经过几何规则有效检查和性能验证。然后MOGA反复运行搜索最优设计，通过基因算法的选择，择优，重组和突变以构建下一代的设计。这个过程直到符合设计要求为止。<br /> <br /> (2)SA模拟退火算法(Simulated Annealing)<br /> <br /> 模拟退火(Simulated Annealing,SA)算法的<a href="http://theory.oecr.com" target="_blank" class="relatedlink">理论</a>基础是1953年Metropolis等人提出的重要性采样法，故又称之为Metropolis算法（或称Metropolis准则）。<br /> <br /> 模拟退火算法是基于Monte Carlo迭代求解策略的一种随机寻优算法。其出发点是基于<a href="http://theory.oecr.com" target="_blank" class="relatedlink">物理</a>中固休物质的退火过程与一般组合优化问题之间的相似性。SA在某一温度下，伴随温度参数的不断下降，结合概率突跳特性，在解空间中随机寻找目标函数的全局最优解，即局部最优解能够概率性的跳出并最终趋于全局最优。SA适用性强，对问题信息依赖较少，因此在诸多工程和<a href="http://theory.oecr.com" target="_blank" class="relatedlink">学术</a>领域得到了研究和应用，但遗憾的是它在多目标优化领域的研究和应用还很少。<br /> <br /> SA算法在应用于MEMS的综合中时，有如名字(simulated Annealing)中表达的一样，SA算法采用模拟加热金属被冷却到最低能量状态，以及一种随机优化算法慢慢“降低温度”遂步达到全局优化。SA算法随机产生一个初始设计，新设计的可变性在极限范围之内是能接受的。因而，具有一定的应用价值。<br /> <br /> (3)定制方法<br /> <br /> MEMS的器件综合方面，现在已经取得了一些进展，如以掩膜版图、制造和相关器件的建模。给出一特定结构，利用<a href="http://opticaldesign.oecr.com" target="_blank" class="relatedlink">软件</a>从一个系统提取高级拓扑结构开始，一直到得到<a href="http://electronic.oecr.com" target="_blank" class="relatedlink">电子</a>-<a href="http://machine.oecr.com" target="_blank" class="relatedlink">机械</a>模型的耦合参数，再用SPICE模拟，优化设计参数，最后得到综合版图（Li,1998、.Lo et al.1996）。这个方法重点是处理参数，而不是拓扑结构综合生成。<br /> <br /> Mukherjee et al.(1997)和Jing(2000)研究了一种有效的生成版图工具，从高级工程设计要求生成MEMS器件拓扑结构。这种方法首先要识别对于给定设计的设计变量，再把问题建模成一正式的数值优化问题，然后用常规的优化方法来解决。<br /> <br /> 上面两种综合方法只适于特定的任务与要求，而不是一般意义上的综合工具。</td></tr></table> </div> <div id="comment_676540" class="cm"> </div> <div id="post_rate_div_676540"></div> </div> </div> </td></tr> <tr><td class="plc plm"> <div id="p_btn" class="mtw mbm hm cl"> <a href="http://club.oecr.com/home.php?mod=spacecp&ac=favorite&type=thread&id=110631&formhash=eafe0bc9" id="k_favorite" onclick="showWindow(this.id, this.href, 'get', 0);" onmouseover="this.title = 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