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复曲面镜抛光工艺技术研究
Research on Toric Mirror Polishing Technology
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作 者:张珈珲 付秀华
ZHANG Jiahui, FU Xiuhua (School of Optoeleetronie engineering, Changchun University of Science and Technology, Changehun 130022)
机构地区:长春理工大学 光电工程学院,长春130022
出 处:《长春理工大学学报:自然科学版》 2014年第1期 25-27页,31页,共4页
Journal of Changchun University of Science and Technology
摘 要:针对Rx为250.7mm,Ry为165.7mm的复曲面透镜,进行了数控研磨和抛光技术研究,给出了批量生产的加工工艺流程,实现了复曲面元件的快速、确定性抛光。通过对复曲面加工的研究,在抛光中对其面型误差进行反馈补偿。最终加工的面型精度小于0.158μm (λ/4),半径公差控制在±0.5mm以内,满足了光学系统中对复曲面元件的要求,并且在保证有较高面型精度和较好表面光洁度的同时,解决了复曲面镜的边缘效应和中心厚度难以控制等加工技术问题。
Aiming to a toric lens, which Rx is 250.7mm and Ry is 165.7mm, CNC grinding and polishing technology was investigated, the processing technology of batch production process was presented. Through the study of toric lens machining,the error feedback compensation is made in the polishing of the surface. Final machining surface precision is less than 0.158μm (λ/4),the radius of tolerance is controled within ±0.5mm,the requirement for complex curved sur-face element in the optical system is satisfied. And at the same time,the high surface precision and better surface fin-ish are guaranteed, the problem of processing technology is solved, which the toric lens center effect and edge effect are hard to control.
关键词:复曲面 铣磨 抛光 边缘效应
toric lens ;milling ;polishing ;edge effect ; |
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