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class="show">阅读模式</a> </div> </div> </div><div class="pct"><style type="text/css">.pcb{margin-right:0}</style><div class="pcb"> <div class="t_fsz"> <table cellspacing="0" cellpadding="0"><tr><td class="t_f" id="postmessage_667601"> 专为<a href="http://sensor.oecr.com" target="_blank" class="relatedlink">半导体</a>和相关产业提供<a href="http://optics.oecr.com" target="_blank" class="relatedlink">工艺</a>控制与成品率管理解决方案的全球领先供应商 KLA-Tencor Corporation宣布，其业界领先的 VisEdge <a href="http://b.oecr.com/sell" target="_blank" class="relatedlink">产品</a>系列又添新员：VisEdge CV300R-EP 边缘度量与检测工具。VisEdge CV300R-EP 推出了两项边缘度量功能，旨在帮助半导体工厂识别晶圆边缘轮廓形状或放置在晶圆上的<a href="http://opticalfilm.oecr.com" target="_blank" class="relatedlink">薄膜</a>边缘可能影响成品率的不规则外形。这些新的度量功能让当前的 VisEdge 系统增添了边缘缺陷检测与检查功能，使 VisEdge CV300R-EP 成为帮助半导体工厂改善与晶圆边缘有关的成品率问题的一个综合工具。<br /> <br /> 半导体工厂印制芯片时要尽可能靠近晶圆边缘，力求从每个晶圆上获得最多数量的芯片。然而，晶圆边缘附近的芯片通常成品率最低。为了解决边缘成品率问题，半导体工厂需要控制每个薄膜边缘长到于何处——是在晶圆的平坦前表面，还是超过平坦表面进入倾斜坡面——且要在装置<a href="http://optics.oecr.com" target="_blank" class="relatedlink">加工</a>期间让每个薄膜的周长与其前后放置的薄膜周长相匹配。VisEdge CV300R-EP 提供了晶圆边缘轮廓的校准<a href="http://opticaltest.oecr.com" target="_blank" class="relatedlink">测量</a>法，包括薄膜边缘可能长到的斜面坡度。此外，VisEdge CV300R-EP 还是第一个系统,纳入图形成像边缘芯片（包括不完整芯片）的数据，在制程中对薄膜边缘及其与晶圆本身或与相邻薄膜之同心性进行追踪。其他解决方案忽略了图形成像区域的数据，此类方法可能导致对薄膜边缘追踪的精确性降低。<br /> <br /> 位于德国 Dresden 的GLOBALFOUNDRIES, Inc. Fab1的无污染制造 (Contamination Free Manufacturing) 经理 Remo Kirsch 表示：“监测薄膜同心性至关重要，因为重叠的薄膜边缘可能导致薄膜剥离，边缘缺陷增加，并最终造成成品率损失。KLA-Tencor 的 VisEdge 工具拥有在晶圆边缘的图形成像区域和非成像区域对铜薄膜边缘位置进行追踪的独特功能，让我们能够确定铜薄膜相对于晶圆中心的同心性。我们已经实施了使用 VisEdge 系统进行每日监测的策略，对铜制程的工艺设备进行监测。”<br /> <br /> KLA-Tencor 的 SWIFT部门 副总裁兼总经理 Oreste Donzella 称：“边缘轮廓监测是 VisEdge 平台的另一个新生应用案例。我们发现，斜角和其他边缘轮廓参数值在各晶圆供应商之间会有很大差异。例如，斜角的变化会影响外周的薄膜结构，并牵连薄膜完整性，最终影响晶圆成品率。VisEdge CV300R-EP 能够识别其边缘轮廓没有达到制程要求的晶圆。”<br /> <br /> VisEdge CV300R-EP 检测与度量系统的新算法和新边缘轮廓模块实现了以下功能：<br /> <br /> • 在晶圆的边缘附近和顶部斜区（现在包括图形成像区域）同时进行边缘缺陷检测和多层边缘度量，以提供更大的覆盖范围和更精确的薄膜边缘测定<br /> <br /> • 在晶圆的边缘附近、顶部与底部斜面及顶点区域，通过多种接受方式（反射、散射、相位）对缺陷进行显像与分类<br /> <br /> • 搭载高分辨率检查显微镜<br /> <br /> • 对所有十六个 SEMI 标准参数进行校准边缘轮廓测量，在半导体工厂实现裸晶圆的进货质量控制<br /> <br /> • 边缘轮廓反馈至度量算法，以对斜面的薄膜层积高度 (“z-cut”) 进行精确测量<br /> <br /> • 在低对比度薄膜上的性能较之前代产品更强，且能够对电介质薄膜中的埋藏边缘进行侦测<br /> <br /> • 光度头可以旋转，杜绝了“盲点”和“缝补”错误<br /> <br /> KLA-Tencor 的 VisEdge CV300R-EP 晶圆边缘检测与度量系统既可作为新系统采购，也可从 VisEdge CV300R 进行现场升级。为了保持高性能和高产能，VisEdge 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