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onclick="readmode($('thread_subject').innerHTML, 676534);" class="show">阅读模式</a> </div> </div> </div><div class="pct"><style type="text/css">.pcb{margin-right:0}</style><div class="pcb"> <div class="t_fsz"> <table cellspacing="0" cellpadding="0"><tr><td class="t_f" id="postmessage_676534"> 随着微<a href="http://optics.oecr.com" target="_blank" class="relatedlink">加工</a>技术的愈益成熟,MEMS及其他微制造技术<a href="http://display.oecr.com" target="_blank" class="relatedlink">显示</a>出巨大的发展潜力。美国<a href="http://theory.oecr.com" target="_blank" class="relatedlink">物理</a>学家Richard P. Feynman于1959年12月29日在加州理工学院举行的美国物理协会的年度会议上发表了题目为There's Plenty of Room at the Bottom的演讲,并发表在1960 年2 月的Cal tech's Engineering and Science上。其中描述道:“我将要介绍的是另外一个方向,在这一方向可以进行微小的研究,但可以做很多事。这一领域和其他的领域相比有很大的不同,不同点在于它无法给我们更多的基本物理,但它更像固体物理,可以发现在复杂情况下的奇怪现象;另外,最重要的一点是由此产生许多技术应用。我要讲的问题就是在微小尺度下操作和控制物质。”<br /> <br /> 事实上,在Feynman演讲之前,科学家们已成功地研制出指甲盖大小的电机;然而, Feynman认为,这些研究成果在小型化的道路上还很原始、粗糙,尚处于幼年时期。他的结论是:“在这以后还有更加令人震惊的微小世界”,他设想可以将整个24卷大英百科全书写在针尖上,要做到这件事只需要将尺寸缩小1/25000即可。Feynman坚信存在微小化的可能性,因为在生物中有众多丰富的写信息微小化的例子。“对于生物学家来说,在一个极其微小的空间可以携带巨量信息是一个事实,我们要解决的问题是揭开在微小的细胞中一个复杂的生物体,就像我们自己的全部信息是如何存储的。”人的细胞是活性的能够完成各种物质的制造、移动和信息存储。基于这一点,他设想一种微小但可以活动的机器(就是人们现在所说的MEMS) ,可以在量子尺度进行计算,排列单个原子,甚至有一天可以在人体内不执行外科手术。历史证实了Feynman的远见卓识, <a href="http://material.oecr.com" target="_blank" class="relatedlink">纳米</a>科技、MEMS及量子计算和分子自组装等领域向人们展示了微小世界的巨大潜力。<br /> <br /> 从量的角度看,微小本身是一个很含混的概念。人们认为, 最基本的一点是微技术或者说MEMS技术的最小实施单位应该是微米,它与直接操作原子或分子的纳米技术显然是有区别的。MEMS在欧洲被称为Microsystem或MST;在亚洲部分地区也有称之为Micromachine的,但在公开发行的文献或互联网上这些称谓均被大家接受,其实质都是一件事情。小的概念与微是紧密相关的,但尺度上肯定是有差别的,在微型化的道路上小型化必然是微的先驱,微与小的最终目的都是在满足人类的物理分辨极限条件下使人类自身受益。不难想像,由MEMS技术制作的器件应该具有如下优点: (1) 体积小、功能强,如美国能源部所属的桑迪亚国家实验室开发的微型齿轮的轮齿只有一个红血球细胞那样大,如此小的部件运动起来非常快,其体积、引力和惯性几乎不产生任何作用; (2) 小而结实; (3) 易于制造,科学家可以轻而易举地在一块很小的硅片上制造数十万个微型部件。在进行适当的改进后,以硅为基础<a href="http://material.oecr.com" target="_blank" class="relatedlink">材料</a>的结构在制作<a href="http://optics.oecr.com" target="_blank" class="relatedlink">工艺</a>上与IC 工艺兼容,能大批量生产,大幅度降低成本,从而可为仪器仪表实现集成化和智能化提供支持。王大珩先生曾这样认为:“仪器仪表在微小化、集成化方面的发展是迅速和必然的,是仪器仪表的共性问题,它的发展将会对21世纪的仪器仪表产生极其深远的影响。”</td></tr></table> </div> <div id="comment_676534" class="cm"> </div> <div id="post_rate_div_676534"></div> </div> </div> </td></tr> <tr><td class="plc plm"> <div id="p_btn" class="mtw mbm hm cl"> <a href="http://club.oecr.com/home.php?mod=spacecp&ac=favorite&type=thread&id=110626&formhash=715b1f82" id="k_favorite" 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