有像差情况下的全息光栅拼接研究

无盐 · 发表于 2015-7-11 00:50:15

有像差情况下的全息光栅拼接研究
Study of Gratings Tiled by Holographic Exposure with Wave Aberration
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作　　者：钱国林[1,2] 吴建宏[1] 李朝明[1] 陈新荣[1] 邹文龙[1]
Qian Guolin;Wu Jianhong;Li Chaoming;Chen Xinrong;Zou Wenlong（1Collaborative Innovation Center of Suzhou Nano Science and Technology, College of Physics, Optoelectronics and Energy, Soochow University, Suzhou, Jiangsu 215006, China 2College of Electronic Information Engineering, Suzhou Vocational University, Suzhou, Jiangsu 215104, China）
机构地区：[1]苏州大学物理与光电·能源学部苏州纳米科技协同创新中心,江苏苏州215006 [2]苏州市职业大学电子信息工程学院,江苏苏州215104
出　　处：《光学学报》 EI CSCD 2015年第3期 34-39页,共6页
Acta Optica Sinica
基　　金：国家自然科学基金（61178046,60808013）; 江苏省高校自然科学研究重大项目（11KJA14001）; 江苏高校优势学科建设工程资助项目; 苏州市应用基础研究项目（SYG201115）
摘　　要：激光约束核聚变系统需要大口径脉冲压缩光栅。全息光栅拼接法是制造大口径光栅的重要手段。针对有像差的全息曝光系统,提出了一种拼缝处光栅对准拼接方法。为研究像差对光栅拼接特性的影响,用随机波面进行了光栅模拟拼接,计算了远场衍射能量分布与拼接误差的关系。实验拼接了（150＋150）×200 mm2口径光栅,其拼接均方根误差值为0.034λ,峰-峰误差值为0.110λ。利用光栅±1级衍射波面,计算得到了曝光系统像差,并模拟了拼缝处最小拼接误差,其均方根误差值为0.016λ,峰-峰误差值为0.105λ。结果表明,拼接误差与理论模拟结果相近。该误差不会造成远场衍射光斑能量明显下降。由此证明了该方法的可行性。
Large-aperture pulse compression gratings are needed by laser confinement fusion system. Tiled-grating made by holographic exposure is an important way to manufacture large aperture gratings. A method is proposed to align the gratings for the exposure system with wave aberration. In order to study the effect of the wave aberration on the characteristics of tiled-grating, the random wave fronts are used to simulate the tiled-gratings.The relationship between the distribution of far-field diffraction energy and the tiling-error is calculated. A grating of（150＋150）×200 mm2 is made experimentally. The root-mean-square value of the tiling-error is 0.034λ and the peak to peak value is 0.110λ. The ± 1st diffraction wave fronts of the grating are used to calculate wave aberration of the exposure system. The minimum value of the tiling-error is simulated theoretically. The root-mean-square value of the error is 0.016λ and the peak to peak value is 0.105λ. The results show that the tiling-error is close to the simulated data. The far-field diffraction intensity can not be decreased obviously by the tiling-error. It is proved that the method proposed in this article is feasible.
关键词：衍射光栅拼接光栅波像差干涉条纹脉冲压缩
diffraction grating ; tiled-grating ; wave aberration ; interference fringe ; pulse compression ;

[技术] 有像差情况下的全息光栅拼接研究

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