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id="favatar1106200" class="pls favatar"> <div class="pi"> <div class="authi"><a href="http://club.oecr.com/space-uid-152801.html" target="_blank" class="xw1" style="color: #33CC00">默默走开0.o</a> </div> </div> <div class="p_pop blk bui card_gender_" id="userinfo1106200" style="display: none; margin-top: -11px;"> <div class="m z"> <div id="userinfo1106200_ma"></div> </div> <div class="i y"> <div> <strong><a href="http://club.oecr.com/space-uid-152801.html" target="_blank" class="xi2" style="color: #33CC00">默默走开0.o</a></strong> <em>当前离线</em> </div><dl class="cl"> <dt>积分</dt><dd><a href="http://club.oecr.com/home.php?mod=space&uid=152801&do=profile" target="_blank" class="xi2">187</a></dd> </dl><div class="imicn"> <a href="http://club.oecr.com/home.php?mod=space&uid=152801&do=profile" target="_blank" title="查看详细资料"><img src="static/image/common/userinfo.gif" alt="查看详细资料" /></a> <a href="http://club.oecr.com/home.php?mod=magic&mid=showip&idtype=user&id=%C4%AC%C4%AC%D7%DF%BF%AA0.o" id="a_showip_li_1106200" class="xi2" onclick="showWindow(this.id, this.href)"><img src="static//image/magic/showip.small.gif" alt="" /> IP卡</a> <a href="http://club.oecr.com/home.php?mod=magic&mid=checkonline&idtype=user&id=%C4%AC%C4%AC%D7%DF%BF%AA0.o" id="a_repent_1106200" class="xi2" onclick="showWindow(this.id, this.href)"><img src="static//image/magic/checkonline.small.gif" alt="" /> 狗仔卡</a> </div> <div id="avatarfeed"><span id="threadsortswait"></span></div> </div> </div> <div> <div class="avatar"><a href="http://club.oecr.com/space-uid-152801.html" class="avtm" target="_blank"><img src="http://www.oecr.com/uc_server/avatar.php?uid=152801&size=middle" /></a></div> </div> </div> </td> <td class="plc"> <div class="pi"> <div id="fj" class="y"> <label class="z">电梯直达</label> <input type="text" class="px p_fre z" size="2" onkeyup="$('fj_btn').href='forum.php?mod=redirect&ptid=261485&authorid=0&postno='+this.value" onkeydown="if(event.keyCode==13) {window.location=$('fj_btn').href;return 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onclick="readmode($('thread_subject').innerHTML, 1106200);" class="show">阅读模式</a> </div> </div> </div><div class="pct"><style type="text/css">.pcb{margin-right:0}</style><div class="pcb"> <div class="t_fsz"> <table cellspacing="0" cellpadding="0"><tr><td class="t_f" id="postmessage_1106200"> 目前公司使用光馳機台<br /> <br /> 但是為了客戶需求所以在設計上必須穿插 低厚的的薄層 來達到客戶規範<br /> <br /> 但是出來的光譜卻不盡理想<br /> <br /> 用TFC及Macleod模擬出來都是為 薄層 多鍍及少鍍所造成<br /> <br /> 公司所使用為 Ti3O5 及 SiO2 這2種藥材<br /> <br /> 使用鍍率為 3Å/sec 及 8Å/sec<br /> <br /> <br /> 薄層 厚度最低為 8nm <a href="http://theory.oecr.com" target="_blank" class="relatedlink">物理</a>厚度<br /> <br /> 都是用光學監控 想說是否有人可以指導一下</td></tr></table> </div> <div id="comment_1106200" class="cm"> </div> <div id="post_rate_div_1106200"></div> </div> </div> </td></tr> <tr><td class="plc plm"> <div id="p_btn" class="mtw mbm hm cl"> <a href="http://club.oecr.com/home.php?mod=spacecp&ac=favorite&type=thread&id=261485&formhash=4f17bd15" id="k_favorite" onclick="showWindow(this.id, this.href, 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#FF99FF">MorningTech</a></strong> <em>当前离线</em> </div><dl class="cl"> <dt>积分</dt><dd><a href="http://club.oecr.com/home.php?mod=space&uid=144230&do=profile" target="_blank" class="xi2">1692</a></dd> </dl><div class="imicn"> <a href="http://club.oecr.com/home.php?mod=space&uid=144230&do=profile" target="_blank" title="查看详细资料"><img src="static/image/common/userinfo.gif" alt="查看详细资料" /></a> <a href="http://club.oecr.com/home.php?mod=magic&mid=showip&idtype=user&id=MorningTech" id="a_showip_li_1106225" class="xi2" onclick="showWindow(this.id, this.href)"><img src="static//image/magic/showip.small.gif" alt="" /> IP卡</a> <a href="http://club.oecr.com/home.php?mod=magic&mid=checkonline&idtype=user&id=MorningTech" id="a_repent_1106225" class="xi2" onclick="showWindow(this.id, this.href)"><img src="static//image/magic/checkonline.small.gif" alt="" /> 狗仔卡</a> </div> <div id="avatarfeed"><span id="threadsortswait"></span></div> </div> </div> <div> <div class="avatar"><a href="http://club.oecr.com/space-uid-144230.html" class="avtm" target="_blank"><img src="http://www.oecr.com/uc_server/avatar.php?uid=144230&size=middle" /></a></div> </div> </div> </td> <td class="plc"> <div class="pi"> <strong> <a href="http://bbs.oecr.com/forum.php?mod=redirect&goto=findpost&ptid=261485&pid=1106225" id="postnum1106225" onclick="setCopy(this.href, '帖子地址复制成功');return false;"> <em>2</em>楼</a> </strong> <div class="pti"> <div class="pdbt"> </div> <div class="authi"> <img class="authicn vm" id="authicon1106225" src="static/image/common/online_member.gif" /> <em id="authorposton1106225">发表于 2013-12-4 09:45:55</em> <span class="pipe">|</span> <a href="http://bbs.oecr.com/forum.php?mod=viewthread&tid=261485&page=1&authorid=144230" rel="nofollow">只看该作者</a> </div> </div> </div><div class="pct"><div class="pcb"> <div class="t_fsz"> <table cellspacing="0" cellpadding="0"><tr><td class="t_f" id="postmessage_1106225"> 薄层的厚度监控改用晶控来做试试。<br /> 8nm薄层是Ti3O5还是 SiO2 ?<br /> //如果薄层在新光控片上，停止信号将在极值附近，信号对厚度不敏感。</td></tr></table> </div> <div id="comment_1106225" class="cm"> </div> <div id="post_rate_div_1106225"></div> </div> </div> </td></tr> <tr><td class="plc plm"> </td> </tr> <tr id="_postposition1106225"></tr> <tr> <td class="pls"></td> <td class="plc" style="overflow:visible;"> <div class="po hin"> <div class="pob cl"> <em> <a class="fastre" href="forum.php?mod=post&action=reply&fid=5&tid=261485&repquote=1106225&extra=page%3D1&page=1" onclick="showWindow('reply', this.href)">回复</a> <a class="replyadd" href="forum.php?mod=misc&action=postreview&do=support&tid=261485&pid=1106225&hash=4f17bd15" onclick="showWindow('login', this.href)" onmouseover="this.title = ($('review_support_1106225').innerHTML ? $('review_support_1106225').innerHTML : 0) + ' 人 支持'">支持 <span id="review_support_1106225"></span></a> <a class="replysubtract" href="forum.php?mod=misc&action=postreview&do=against&tid=261485&pid=1106225&hash=4f17bd15" onclick="showWindow('login', this.href)" 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id="pid1106228" class="plhin" summary="pid1106228" cellspacing="0" cellpadding="0"> <tr> <td class="pls" rowspan="2"> <div id="favatar1106228" class="pls favatar"> <div class="pi"> <div class="authi"><a href="http://club.oecr.com/space-uid-11701.html" target="_blank" class="xw1" style="color: #FFCC00">风寒雪月缺</a> </div> </div> <div class="p_pop blk bui card_gender_" id="userinfo1106228" style="display: none; margin-top: -11px;"> <div class="m z"> <div id="userinfo1106228_ma"></div> </div> <div class="i y"> <div> <strong><a href="http://club.oecr.com/space-uid-11701.html" target="_blank" class="xi2" style="color: #FFCC00">风寒雪月缺</a></strong> <em>当前离线</em> </div><dl class="cl"> <dt>积分</dt><dd><a href="http://club.oecr.com/home.php?mod=space&uid=11701&do=profile" target="_blank" class="xi2">5119</a></dd> </dl><div class="imicn"> <a href="http://club.oecr.com/home.php?mod=space&uid=11701&do=profile" target="_blank" title="查看详细资料"><img src="static/image/common/userinfo.gif" alt="查看详细资料" /></a> <a href="http://club.oecr.com/home.php?mod=magic&mid=showip&idtype=user&id=%B7%E7%BA%AE%D1%A9%D4%C2%C8%B1" id="a_showip_li_1106228" class="xi2" onclick="showWindow(this.id, this.href)"><img src="static//image/magic/showip.small.gif" alt="" /> IP卡</a> <a href="http://club.oecr.com/home.php?mod=magic&mid=checkonline&idtype=user&id=%B7%E7%BA%AE%D1%A9%D4%C2%C8%B1" id="a_repent_1106228" class="xi2" onclick="showWindow(this.id, this.href)"><img src="static//image/magic/checkonline.small.gif" alt="" /> 狗仔卡</a> </div> <div id="avatarfeed"><span id="threadsortswait"></span></div> </div> </div> <div> <div class="avatar"><a href="http://club.oecr.com/space-uid-11701.html" class="avtm" target="_blank"><img src="http://www.oecr.com/uc_server/avatar.php?uid=11701&size=middle" /></a></div> </div> </div> </td> <td class="plc"> <div class="pi"> <strong> <a href="http://bbs.oecr.com/forum.php?mod=redirect&goto=findpost&ptid=261485&pid=1106228" id="postnum1106228" onclick="setCopy(this.href, '帖子地址复制成功');return false;"> <em>3</em>楼</a> </strong> <div class="pti"> <div class="pdbt"> </div> <div class="authi"> <img class="authicn vm" id="authicon1106228" src="static/image/common/online_member.gif" /> <em id="authorposton1106228">发表于 2013-12-4 10:30:45</em> <span class="pipe">|</span> <a href="http://bbs.oecr.com/forum.php?mod=viewthread&tid=261485&page=1&authorid=11701" rel="nofollow">只看该作者</a> </div> </div> </div><div class="pct"><div class="pcb"> <div class="t_fsz"> <table cellspacing="0" cellpadding="0"><tr><td class="t_f" id="postmessage_1106228"> 薄层还是尽量避免的好，这个应该是有办法的，你好好算算。<br /> 薄层用光学监控不行吧，没那么敏感，晶控还可以。不过批次稳定性还是不好，还是想办法消除薄层。</td></tr></table> </div> <div id="comment_1106228" class="cm"> </div> <div id="post_rate_div_1106228"></div> </div> </div> </td></tr> <tr><td class="plc plm"> </td> </tr> <tr id="_postposition1106228"></tr> <tr> <td class="pls"></td> <td class="plc" style="overflow:visible;"> <div class="po hin"> <div class="pob cl"> <em> <a class="fastre" 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bui card_gender_" id="userinfo1106513" style="display: none; margin-top: -11px;"> <div class="m z"> <div id="userinfo1106513_ma"></div> </div> <div class="i y"> <div> <strong><a href="http://club.oecr.com/space-uid-152801.html" target="_blank" class="xi2" style="color: #33CC00">默默走开0.o</a></strong> <em>当前离线</em> </div><dl class="cl"> <dt>积分</dt><dd><a href="http://club.oecr.com/home.php?mod=space&uid=152801&do=profile" target="_blank" class="xi2">187</a></dd> </dl><div class="imicn"> <a href="http://club.oecr.com/home.php?mod=space&uid=152801&do=profile" target="_blank" title="查看详细资料"><img src="static/image/common/userinfo.gif" alt="查看详细资料" /></a> <a href="http://club.oecr.com/home.php?mod=magic&mid=showip&idtype=user&id=%C4%AC%C4%AC%D7%DF%BF%AA0.o" id="a_showip_li_1106513" class="xi2" onclick="showWindow(this.id, this.href)"><img src="static//image/magic/showip.small.gif" alt="" /> IP卡</a> <a href="http://club.oecr.com/home.php?mod=magic&mid=checkonline&idtype=user&id=%C4%AC%C4%AC%D7%DF%BF%AA0.o" id="a_repent_1106513" class="xi2" onclick="showWindow(this.id, this.href)"><img src="static//image/magic/checkonline.small.gif" alt="" /> 狗仔卡</a> </div> <div id="avatarfeed"><span id="threadsortswait"></span></div> </div> </div> <div> <div class="avatar"><a href="http://club.oecr.com/space-uid-152801.html" class="avtm" target="_blank"><img src="http://www.oecr.com/uc_server/avatar.php?uid=152801&size=middle" /></a></div> </div> </div> </td> <td class="plc"> <div class="pi"> <strong> <a href="http://bbs.oecr.com/forum.php?mod=redirect&goto=findpost&ptid=261485&pid=1106513" id="postnum1106513" onclick="setCopy(this.href, '帖子地址复制成功');return false;"> <em>4</em>楼</a> </strong> <div class="pti"> <div class="pdbt"> </div> <div class="authi"> <img class="authicn vm" id="authicon1106513" src="static/image/common/ico_lz.png" /> 楼主<span class="pipe">|</span> <em id="authorposton1106513">发表于 2013-12-6 10:13:52</em> <span class="pipe">|</span> <a href="http://bbs.oecr.com/forum.php?mod=viewthread&tid=261485&page=1&authorid=152801" rel="nofollow">只看该作者</a> </div> </div> </div><div class="pct"><div class="pcb"> <div class="t_fsz"> <table cellspacing="0" cellpadding="0"><tr><td class="t_f" id="postmessage_1106513"> 是阿，我也是都避免薄層的存在<br /> <br /> 但還是有出現<br /> <br /> 有改用膜厚監控來使用 ，跟先前用光控比起來好多了 <br /> <br /> 8mm 是 SiO2 ..<img src="static/image/smiley/Panda/10.gif" smilieid="202" border="0" alt="" /> </td></tr></table> </div> <div id="comment_1106513" class="cm"> <h3 class="psth xs1"><span class="icon_ring vm"></span>点评</h3> <div class="pstl xs1 cl"> <div class="psta vm"> <a href="http://club.oecr.com/space-uid-144230.html" c="1"><img src="http://www.oecr.com/uc_server/avatar.php?uid=144230&size=small" /></a> <a href="http://club.oecr.com/space-uid-144230.html" class="xi2 xw1">MorningTech</a> </div> <div class="psti"> SiO2，光控在第二层上的吧，前面层的监控误差也会传递到它的。 因为光控只能判停，而无法清楚知道起始情况。 晶控则不同，它是根据起始终止频率来计算膜厚的，所以，只要Tooling抓准确了，算物理厚度还是最拿手的。 <span class="xg1"> 发表于 2013-12-6 10:56</span> </div> </div> </div> <div id="post_rate_div_1106513"></div> </div> </div> </td></tr> <tr><td class="plc plm"> </td> </tr> <tr id="_postposition1106513"></tr> <tr> <td class="pls"></td> <td class="plc" style="overflow:visible;"> <div class="po hin"> <div class="pob cl"> <em> <a class="fastre" href="forum.php?mod=post&action=reply&fid=5&tid=261485&repquote=1106513&extra=page%3D1&page=1" onclick="showWindow('reply', this.href)">回复</a> <a class="replyadd" href="forum.php?mod=misc&action=postreview&do=support&tid=261485&pid=1106513&hash=4f17bd15" onclick="showWindow('login', this.href)" onmouseover="this.title = ($('review_support_1106513').innerHTML ? $('review_support_1106513').innerHTML : 0) + ' 人 支持'">支持 <span id="review_support_1106513"></span></a> <a class="replysubtract" href="forum.php?mod=misc&action=postreview&do=against&tid=261485&pid=1106513&hash=4f17bd15" 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posta4" id="post_1106514" ><table id="pid1106514" class="plhin" summary="pid1106514" cellspacing="0" cellpadding="0"> <tr> <td class="pls" rowspan="2"> <div id="favatar1106514" class="pls favatar"> <a name="lastpost"></a><div class="pi"> <div class="authi"><a href="http://club.oecr.com/space-uid-144230.html" target="_blank" class="xw1" style="color: #FF99FF">MorningTech</a> </div> </div> <div class="p_pop blk bui card_gender_" id="userinfo1106514" style="display: none; margin-top: -11px;"> <div class="m z"> <div id="userinfo1106514_ma"></div> </div> <div class="i y"> <div> <strong><a href="http://club.oecr.com/space-uid-144230.html" target="_blank" class="xi2" style="color: #FF99FF">MorningTech</a></strong> <em>当前离线</em> </div><dl class="cl"> <dt>积分</dt><dd><a href="http://club.oecr.com/home.php?mod=space&uid=144230&do=profile" target="_blank" class="xi2">1692</a></dd> </dl><div class="imicn"> <a href="http://club.oecr.com/home.php?mod=space&uid=144230&do=profile" target="_blank" title="查看详细资料"><img src="static/image/common/userinfo.gif" alt="查看详细资料" /></a> <a href="http://club.oecr.com/home.php?mod=magic&mid=showip&idtype=user&id=MorningTech" id="a_showip_li_1106514" class="xi2" onclick="showWindow(this.id, this.href)"><img src="static//image/magic/showip.small.gif" alt="" /> IP卡</a> <a href="http://club.oecr.com/home.php?mod=magic&mid=checkonline&idtype=user&id=MorningTech" id="a_repent_1106514" class="xi2" onclick="showWindow(this.id, this.href)"><img src="static//image/magic/checkonline.small.gif" alt="" /> 狗仔卡</a> </div> <div id="avatarfeed"><span id="threadsortswait"></span></div> </div> </div> <div> <div class="avatar"><a href="http://club.oecr.com/space-uid-144230.html" class="avtm" target="_blank"><img src="http://www.oecr.com/uc_server/avatar.php?uid=144230&size=middle" /></a></div> </div> </div> </td> <td class="plc"> <div class="pi"> <strong> <a href="http://bbs.oecr.com/forum.php?mod=redirect&goto=findpost&ptid=261485&pid=1106514" id="postnum1106514" onclick="setCopy(this.href, '帖子地址复制成功');return false;"> <em>5</em>楼</a> </strong> <div class="pti"> <div class="pdbt"> </div> <div class="authi"> <img class="authicn vm" id="authicon1106514" src="static/image/common/online_member.gif" /> <em id="authorposton1106514">发表于 2013-12-6 10:45:17</em> <span class="pipe">|</span> <a href="http://bbs.oecr.com/forum.php?mod=viewthread&tid=261485&page=1&authorid=144230" rel="nofollow">只看该作者</a> </div> </div> </div><div class="pct"><div class="pcb"> <div class="t_fsz"> <table cellspacing="0" cellpadding="0"><tr><td class="t_f" id="postmessage_1106514"> <div class="quote"><blockquote><font size="2"><font color="#999999">默默走开0.o 发表于 2013-12-6 10:13</font> <a href="http://bbs.oecr.com/forum.php?mod=redirect&goto=findpost&pid=1106513&ptid=261485" target="_blank"><img id="aimg_SGNVx" onclick="zoom(this, this.src, 0, 0, 0)" class="zoom" file="static/image/common/back.gif" onmouseover="img_onmouseoverfunc(this)" lazyloadthumb="1" border="0" alt="" /></a></font><br /> 是阿，我也是都避免薄層的存在<br /> <br /> 但還是有出現</blockquote></div><br /> <br /> 恭喜。<br /> 好在薄层是 SiO2，用晶控直接监控问题还不算大，晶控真实监控误差一般会在 1nm以内。<br /> 否则你会发现误差还是稍大一点点的，更确切的说是偏差，呵呵。</td></tr></table> </div> <div id="comment_1106514" class="cm"> </div> <div id="post_rate_div_1106514"></div> </div> </div> </td></tr> <tr><td class="plc plm"> </td> </tr> <tr id="_postposition1106514"></tr> <tr> <td class="pls"></td> <td class="plc" style="overflow:visible;"> <div class="po hin"> <div class="pob cl"> <em> <a class="fastre" href="forum.php?mod=post&action=reply&fid=5&tid=261485&repquote=1106514&extra=page%3D1&page=1" onclick="showWindow('reply', this.href)">回复</a> <a class="replyadd" href="forum.php?mod=misc&action=postreview&do=support&tid=261485&pid=1106514&hash=4f17bd15" onclick="showWindow('login', this.href)" onmouseover="this.title = ($('review_support_1106514').innerHTML ? $('review_support_1106514').innerHTML : 0) + ' 人 支持'">支持 <span 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