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</ignore_js_op> <br /> <br /> 摘 要<br /> 近些年随着我国中长期科技发展计划的实施，推动了光学检测技术的飞速发展。本文概要介绍了光学检测技术在国家点火装置（NIF）、神光装置系列、LAMOST工程、02专项等科学工程中的应用。根据各类重大科学工程对光学检测的技术要求，总结出现代光学检测技术的现状，并提出光学检测技术在未来的发展方向。<br /> 【1】徐德衍，王青，高志山等. 现行光学元件检测与国际标准[M]. 科学出版社, 2009.<br /> <br /> 【2】晓晨. “国家点火装置” 概况[J]. <a href="http://laser.oecr.com" target="_blank" class="relatedlink">激光</a>与光<a href="http://electronic.oecr.com" target="_blank" class="relatedlink">电子</a>学进展, 2003, 40(9):2-3.<br /> <br /> 【3】罗山. “国家点火装置” 激光系统特别工作组最终报告[J]. 激光与光电子学进展, 2002, 39(9):1-4.<br /> <br /> 【4】杜凯. 国家点火装置 (NIF) 点火靶制备技术研究进展[J]. <a href="http://theory.oecr.com" target="_blank" class="relatedlink">物理</a>, 2009, 38(12):914-914.<br /> <br /> 【5】Atherton J. 国家点火装置光学元件的制造[J]. 强激光技术进展, 1999, 3:12-18.<br /> <br /> 【6】彭翰生, 范滇元. 高功率固体激光装置的发展与工程科学问题[J]. 中国工程科学, 2001, 3(3):1-8.<br /> <br /> 【7】http://www.taylor-hobson.com<br /> <br /> 【8】陈建超. 超精密<a href="http://optics.oecr.com" target="_blank" class="relatedlink">加工</a>表面粗糙度<a 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Research in Astronomy and Astrophysics, 2012, 12(9):1197.<br /> <br /> 【25】凌宁, 官春林. 61 单元分立式压电变形反射镜的研制[J]. 量子电子学报, 1998, 15(2):200-205.<br /> <br /> 【26】极大规模集成<a href="http://electronic.oecr.com" target="_blank" class="relatedlink">电路</a>制造装备与成套<a href="http://optics.oecr.com" target="_blank" class="relatedlink">工艺</a>专项．国家科技重大专项<br /> <br /> 【27】Piscani E C, Ashworth D, Byers J, et al. Continuing 193nm optical lithography for 32nm imaging and beyond[C].Advanced Lithography. International Society for Optics and Photonics, 2008: 69242I-69242I-12.<br /> <br /> 【28】Matsuyama T, Ohmura Y, Williamson D M. The lithographic lens: its history and evolution[C].SPIE, 2006, 6154: 615403.<br /> <br /> 【29】李连进. 光刻机镜头的结构设计与装配[J]. 天津理工学院学报, 2004, 1(20):24.<br /> <br /> 【30】Takeuchi S, Kakuchi O, Yamazoe K et al. Visible light point-diffraction interferometer for testing of EUVL optics[C].SPIE. 2006, 6151:61510E.<br /> <br /> 【31】Ota K, Yamamoto T, Fukuda Y et al. Advanced point diffraction interferometer for EUV aspherical mirrors[C].SPIE, 2001, 4343:543-550.<br /> <br /> 【32】张宇, 金春水, 马冬梅等. 可见光移相点衍射干涉仪的测试误差分析[J]. 红外与激光工程, 2012, 41(5):1351-1356.<br /> <br /> 【33】郑猛, 李艳秋, 刘克. 相移点衍射干涉仪用衍射板结构设计[J]. 激光与光电子学进展, 2013, 50(3):97-103.<br /> <br /> 【34】王道档, 杨甬英, 陈琛等. 点衍射球面检测中的斜反射波前像差校正[J]. 光学学报, 2011, 31(6):100-105.<br /> <br /> 【35】Yi M, Haga T, Walton C et al. High sensitivity actinic detection of native defects on extreme ultraviolet lithography mask blanks[J]. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2001, 19(6):2401-2405.<br /> <br /> 【36】Tezuka Y, Ito M, Terasawa T et al. Actinic detection of multilayer defects on EUV mask blanks using LPP light source and dark-field imaging[C].Microlithography 2004. International Society for Optics and Photonics, 2004:271-280.<br /> <br /> 【37】Terasawa T, Tezuka Y, Ito M et al. 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EUV 掩模版在曝光过程中的热变形[J]. 微细加工技术, 2006, 4:05.<br /> <br /> 【40】曹宇婷, 王向朝, 步扬等. 极紫外投影光刻掩模阴影效应分析[J]. 光学学报, 2012, 32(8):42-46.<br /> <br /> 【41】杨世杰. 国际上新一代望远镜状况及对我们工作的几点看法。96’全国光学非球面制造与检测<a href="http://theory.oecr.com" target="_blank" class="relatedlink">学术</a>会议报告，2005<br /> <br /> 【42】张宝安, 陈鹤明, 朱健强. 大口径激光玻璃光学加工的质量控制[J]. 应用光学, 2009, 30(1):96-100.</td></tr></table> <div class="ptg mbm mtn"> <a title="工程" href="misc.php?mod=tag&id=2142" target="_blank">工程</a>, <a title="光学" href="misc.php?mod=tag&id=17" target="_blank">光学</a>, <a title="技术" href="misc.php?mod=tag&id=1394" target="_blank">技术</a>, <a title="检测" href="misc.php?mod=tag&id=1567" target="_blank">检测</a></div> </div> <div id="comment_1111886" class="cm"> </div> <div id="post_rate_div_1111886"></div> </div> </div> </td></tr> <tr><td class="plc plm"> <div id="p_btn" class="mtw mbm hm cl"> <a href="http://club.oecr.com/home.php?mod=spacecp&ac=favorite&type=thread&id=262046&formhash=b9395b1a" id="k_favorite" onclick="showWindow(this.id, 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</ul> </div> </td> </tr> <tr id="_postposition1111886"></tr> <tr> <td class="pls"></td> <td class="plc" style="overflow:visible;"> <div class="po hin"> <div class="pob cl"> <em> <a class="fastre" href="forum.php?mod=post&action=reply&fid=4&tid=262046&reppost=1111886&extra=page%3D1&page=1" onclick="showWindow('reply', this.href)">回复</a> </em> <p> <a href="javascript:;" id="mgc_post_1111886" onmouseover="showMenu(this.id)" class="showmenu">使用道具</a> <a href="javascript:;" onclick="showWindow('miscreport1111886', 'misc.php?mod=report&rtype=post&rid=1111886&tid=262046&fid=4', 'get', -1);return false;">举报</a> </p> <ul id="mgc_post_1111886_menu" class="p_pop mgcmn" style="display: none;"> <li><a href="http://club.oecr.com/home.php?mod=magic&mid=bump&idtype=tid&id=262046" id="a_bump" onclick="showWindow(this.id, this.href)"><img src="static/image/magic/bump.small.gif" />提升卡</a></li> <li><a href="http://club.oecr.com/home.php?mod=magic&mid=stick&idtype=tid&id=262046" id="a_stick" 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margin-top: -11px;"> <div class="m z"> <div id="userinfo1112005_ma"></div> </div> <div class="i y"> <div> <strong><a href="http://club.oecr.com/space-uid-8469.html" target="_blank" class="xi2" style="color: #0033CC">wjf990</a></strong> <em>当前离线</em> </div><dl class="cl"> <dt>积分</dt><dd><a href="http://club.oecr.com/home.php?mod=space&uid=8469&do=profile" target="_blank" class="xi2">6171</a></dd> </dl><div class="imicn"> <a href="http://club.oecr.com/home.php?mod=space&uid=8469&do=profile" target="_blank" title="查看详细资料"><img src="static/image/common/userinfo.gif" alt="查看详细资料" /></a> <a href="http://club.oecr.com/home.php?mod=magic&mid=showip&idtype=user&id=wjf990" id="a_showip_li_1112005" class="xi2" onclick="showWindow(this.id, this.href)"><img src="static//image/magic/showip.small.gif" alt="" /> IP卡</a> <a href="http://club.oecr.com/home.php?mod=magic&mid=checkonline&idtype=user&id=wjf990" id="a_repent_1112005" class="xi2" onclick="showWindow(this.id, this.href)"><img src="static//image/magic/checkonline.small.gif" alt="" /> 狗仔卡</a> </div> <div id="avatarfeed"><span id="threadsortswait"></span></div> </div> </div> <div> <div class="avatar"><a href="http://club.oecr.com/space-uid-8469.html" class="avtm" target="_blank"><img src="http://www.oecr.com/uc_server/avatar.php?uid=8469&size=middle" /></a></div> </div> </div> </td> <td class="plc"> <div class="pi"> <strong> <a href="http://bbs.oecr.com/forum.php?mod=redirect&goto=findpost&ptid=262046&pid=1112005" id="postnum1112005" onclick="setCopy(this.href, '帖子地址复制成功');return false;"> <em>2</em>楼</a> </strong> <div class="pti"> <div class="pdbt"> </div> <div class="authi"> <img class="authicn vm" id="authicon1112005" src="static/image/common/online_member.gif" /> <em id="authorposton1112005">发表于 2014-2-14 14:58:41</em> <span class="pipe">|</span> <a href="http://bbs.oecr.com/forum.php?mod=viewthread&tid=262046&page=1&authorid=8469" rel="nofollow">只看该作者</a> </div> </div> </div><div class="pct"><div class="pcb"> <div class="t_fsz"> <table cellspacing="0" cellpadding="0"><tr><td class="t_f" id="postmessage_1112005"> <i class="pstatus"> 本帖最后由 wjf990 于 2014-2-14 15:16 编辑 </i><br /> <br /> 谢谢楼主共享资料，第一节虽然只是对干涉检测技术做了一个排队检阅，至少是近来少有的行业动态总结了，第二节从实例再来介绍就看着比较爽了啊！有条件的兄弟们别忘了我们这些外部信息闭塞的苦哈哈啊!楼主V5！<img src="static/image/smiley/Tiger/05.gif" smilieid="143" border="0" alt="" /></td></tr></table> </div> <div id="comment_1112005" class="cm"> </div> <div id="post_rate_div_1112005"></div> </div> </div> </td></tr> <tr><td class="plc plm"> </td> </tr> <tr id="_postposition1112005"></tr> <tr> <td class="pls"></td> <td class="plc" style="overflow:visible;"> <div class="po hin"> <div class="pob cl"> <em> <a class="fastre" href="forum.php?mod=post&action=reply&fid=4&tid=262046&repquote=1112005&extra=page%3D1&page=1" onclick="showWindow('reply', this.href)">回复</a> <a class="replyadd" href="forum.php?mod=misc&action=postreview&do=support&tid=262046&pid=1112005&hash=b9395b1a" onclick="showWindow('login', 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#FF9900">bairuizheng</a></strong> <em>当前离线</em> </div><dl class="cl"> <dt>积分</dt><dd><a href="http://club.oecr.com/home.php?mod=space&uid=118018&do=profile" target="_blank" class="xi2">10202</a></dd> </dl><div class="imicn"> <a href="http://club.oecr.com/home.php?mod=space&uid=118018&do=profile" target="_blank" title="查看详细资料"><img src="static/image/common/userinfo.gif" alt="查看详细资料" /></a> <a href="http://club.oecr.com/home.php?mod=magic&mid=showip&idtype=user&id=bairuizheng" id="a_showip_li_1112023" class="xi2" onclick="showWindow(this.id, this.href)"><img src="static//image/magic/showip.small.gif" alt="" /> IP卡</a> <a href="http://club.oecr.com/home.php?mod=magic&mid=checkonline&idtype=user&id=bairuizheng" id="a_repent_1112023" class="xi2" onclick="showWindow(this.id, this.href)"><img src="static//image/magic/checkonline.small.gif" alt="" /> 狗仔卡</a> </div> <div id="avatarfeed"><span id="threadsortswait"></span></div> </div> </div> <div> <div class="avatar"><a href="http://club.oecr.com/space-uid-118018.html" class="avtm" target="_blank"><img src="http://www.oecr.com/uc_server/avatar.php?uid=118018&size=middle" /></a></div> </div> </div> </td> <td class="plc"> <div class="pi"> <strong> <a href="http://bbs.oecr.com/forum.php?mod=redirect&goto=findpost&ptid=262046&pid=1112023" id="postnum1112023" onclick="setCopy(this.href, '帖子地址复制成功');return false;"> <em>3</em>楼</a> </strong> <div class="pti"> <div class="pdbt"> </div> <div class="authi"> <img class="authicn vm" id="authicon1112023" src="static/image/common/online_member.gif" /> <em id="authorposton1112023">发表于 2014-2-15 00:12:23</em> <span class="pipe">|</span> <a href="http://bbs.oecr.com/forum.php?mod=viewthread&tid=262046&page=1&authorid=118018" rel="nofollow">只看该作者</a> </div> </div> </div><div class="pct"><div class="pcb"> <div class="t_fsz"> <table cellspacing="0" cellpadding="0"><tr><td class="t_f" id="postmessage_1112023"> 谢谢, 下来看看.</td></tr></table> </div> <div id="comment_1112023" class="cm"> </div> <div id="post_rate_div_1112023"></div> </div> </div> </td></tr> <tr><td class="plc plm"> </td> </tr> <tr id="_postposition1112023"></tr> <tr> <td class="pls"></td> <td class="plc" style="overflow:visible;"> <div class="po hin"> <div class="pob cl"> <em> <a class="fastre" href="forum.php?mod=post&action=reply&fid=4&tid=262046&repquote=1112023&extra=page%3D1&page=1" onclick="showWindow('reply', this.href)">回复</a> <a class="replyadd" href="forum.php?mod=misc&action=postreview&do=support&tid=262046&pid=1112023&hash=b9395b1a" onclick="showWindow('login', this.href)" onmouseover="this.title = ($('review_support_1112023').innerHTML ? $('review_support_1112023').innerHTML : 0) + ' 人 支持'">支持 <span id="review_support_1112023"></span></a> <a class="replysubtract" href="forum.php?mod=misc&action=postreview&do=against&tid=262046&pid=1112023&hash=b9395b1a" onclick="showWindow('login', this.href)" onmouseover="this.title = ($('review_against_1112023').innerHTML ? 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cellpadding="0"> <tr> <td class="pls" rowspan="2"> <div id="favatar1112149" class="pls favatar"> <div class="pi"> <div class="authi"><a href="http://club.oecr.com/space-uid-125785.html" target="_blank" class="xw1" style="color: #FF00CC">xianlingyue</a> </div> </div> <div class="p_pop blk bui card_gender_" id="userinfo1112149" style="display: none; margin-top: -11px;"> <div class="m z"> <div id="userinfo1112149_ma"></div> </div> <div class="i y"> <div> <strong><a href="http://club.oecr.com/space-uid-125785.html" target="_blank" class="xi2" style="color: #FF00CC">xianlingyue</a></strong> <em>当前离线</em> </div><dl class="cl"> <dt>积分</dt><dd><a href="http://club.oecr.com/home.php?mod=space&uid=125785&do=profile" target="_blank" class="xi2">3022</a></dd> </dl><div class="imicn"> <a href="http://club.oecr.com/home.php?mod=space&uid=125785&do=profile" target="_blank" title="查看详细资料"><img src="static/image/common/userinfo.gif" alt="查看详细资料" /></a> <a href="http://club.oecr.com/home.php?mod=magic&mid=showip&idtype=user&id=xianlingyue" id="a_showip_li_1112149" class="xi2" onclick="showWindow(this.id, this.href)"><img src="static//image/magic/showip.small.gif" alt="" /> IP卡</a> <a href="http://club.oecr.com/home.php?mod=magic&mid=checkonline&idtype=user&id=xianlingyue" id="a_repent_1112149" class="xi2" onclick="showWindow(this.id, this.href)"><img src="static//image/magic/checkonline.small.gif" alt="" /> 狗仔卡</a> </div> <div id="avatarfeed"><span id="threadsortswait"></span></div> </div> </div> <div> <div class="avatar"><a href="http://club.oecr.com/space-uid-125785.html" class="avtm" target="_blank"><img src="http://www.oecr.com/uc_server/avatar.php?uid=125785&size=middle" /></a></div> </div> </div> </td> <td class="plc"> <div class="pi"> <strong> <a href="http://bbs.oecr.com/forum.php?mod=redirect&goto=findpost&ptid=262046&pid=1112149" id="postnum1112149" onclick="setCopy(this.href, '帖子地址复制成功');return false;"> <em>4</em>楼</a> </strong> <div class="pti"> <div class="pdbt"> </div> <div class="authi"> <img class="authicn vm" id="authicon1112149" src="static/image/common/online_member.gif" /> <em id="authorposton1112149">发表于 2014-2-17 11:18:17</em> <span class="pipe">|</span> <a href="http://bbs.oecr.com/forum.php?mod=viewthread&tid=262046&page=1&authorid=125785" rel="nofollow">只看该作者</a> </div> </div> </div><div class="pct"><div class="pcb"> <div class="t_fsz"> <table cellspacing="0" cellpadding="0"><tr><td class="t_f" id="postmessage_1112149"> <img src="static/image/smiley/Tiger/05.gif" smilieid="143" border="0" alt="" /><img src="static/image/smiley/Tiger/05.gif" smilieid="143" border="0" alt="" /><img src="static/image/smiley/Tiger/05.gif" smilieid="143" border="0" alt="" /></td></tr></table> </div> <div id="comment_1112149" class="cm"> </div> <div id="post_rate_div_1112149"></div> </div> </div> </td></tr> <tr><td class="plc plm"> </td> </tr> <tr id="_postposition1112149"></tr> <tr> <td class="pls"></td> <td 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class="pipe">|</span> <em id="authorposton1112158">发表于 2014-2-17 12:37:43</em> <span class="pipe">|</span> <a href="http://bbs.oecr.com/forum.php?mod=viewthread&tid=262046&page=1&authorid=107094" rel="nofollow">只看该作者</a> </div> </div> </div><div class="pct"><div class="pcb"> <div class="t_fsz"> <table cellspacing="0" cellpadding="0"><tr><td class="t_f" id="postmessage_1112158"> <div class="quote"><blockquote><font size="2"><font color="#999999">wjf990 发表于 2014-2-14 14:58</font> <a href="http://bbs.oecr.com/forum.php?mod=redirect&goto=findpost&pid=1112005&ptid=262046" target="_blank"><img id="aimg_b7BWH" onclick="zoom(this, this.src, 0, 0, 0)" class="zoom" file="static/image/common/back.gif" onmouseover="img_onmouseoverfunc(this)" lazyloadthumb="1" border="0" alt="" /></a></font><br /> 谢谢楼主共享资料，第一节虽然只是对干涉检测技术做了一个排队检阅，至少是近来少有的行业动态总结了，第二 ...</blockquote></div><br /> 分享分享大家都能了解到最新专业信息哇</td></tr></table> </div> <div id="comment_1112158" class="cm"> </div> <div 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