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209870);" class="show">阅读模式</a> </div> </div> </div><div class="pct"><style type="text/css">.pcb{margin-right:0}</style><div class="pcb"> <div class="t_fsz"> <table cellspacing="0" cellpadding="0"><tr><td class="t_f" id="postmessage_209870"> <P align=center class=MsoNormal style="TEXT-ALIGN: center; mso-outline-level: 1">VM系列光学扫描镜</P> <P>振镜简介：</P> <P >该系列振镜可为工业和高分辨率系统选择长寿命、扫描平滑的振镜提供一种选择。（冷却风扇可选。）</P> <P><v:shapetype><v:stroke joinstyle="miter"></v:stroke><v:formulas><v:f eqn="if lineDrawn pixelLineWidth 0"></v:f><v:f eqn="sum @0 1 0"></v:f><v:f eqn="sum 0 0 @1"></v:f><v:f eqn="prod @2 1 2"></v:f><v:f eqn="prod @3 21600 pixelWidth"></v:f><v:f eqn="prod @3 21600 pixelHeight"></v:f><v:f eqn="sum @0 0 1"></v:f><v:f eqn="prod @6 1 2"></v:f><v:f eqn="prod @7 21600 pixelWidth"></v:f><v:f eqn="sum @8 21600 0"></v:f><v:f eqn="prod @7 21600 pixelHeight"></v:f><v:f eqn="sum @10 21600 0"></v:f></v:formulas><v:path connecttype="rect" gradientshapeok="t" extrusionok="f"></v:path><lock aspectratio="t" v:ext="edit"></lock></v:shapetype><v:shape><v:imagedata></v:imagedata></v:shape> <v:shape><v:imagedata></v:imagedata></v:shape></P> <P><B>超长寿命：<p></p></B></P> <P >FM系列的光学扫描镜采用flexure代替轴承获得任何一种轴承扫描镜无法相比的超常寿命。</P> <P >系统能够以很高的频率扫描，能够很快的用光轴承扫描所能够提供的周期次数。</P> <P >采用高惯性负载和重复扫描模式将会对加速轴承磨损和缩短扫描镜的整个寿命。这就是GSI</P> <P >Lumonics 提供了一系列FM扫描镜，将移动电磁扫描镜的高扭矩和flexure技术结合起来从而获得了超长的使用寿命。采用FM系列的透镜能够去除润滑油中的气泡，以免造成在近似真空的环境下光学系统的降级。FM系列的扫描镜能够减少维修的次数增加底线。</P> <P><B>非常平滑的扫描：<p></p></B></P> <P >FM系列的扫描镜最初的设计目的是用于光子质量的打印引擎，这种应用要避免最低水平的抖动和晃动。FM系列的扫描镜能够避免由于轴承的静态和动态的摩擦而造成的抖动。也可以从根本上避免由于轴承的几何安装不当造成的晃动。FM系列的扫描镜能够获得尽可能低的抖动和晃动。正是由于去掉了轴承部分，FM系列的扫描镜才能够提供全寿命周期的优良性能.</P> <P><B>振镜指标的动态参数：<p></p></B></P> <DIV align=center> <TABLE border=1 cellPadding=0 cellSpacing=0 style="BORDER-BOTTOM: medium none; BORDER-COLLAPSE: collapse; BORDER-LEFT: medium none; BORDER-RIGHT: medium none; BORDER-TOP: medium none; WIDTH: 75%; mso-border-alt: solid windowtext .5pt; mso-padding-alt: 0cm 5.4pt 0cm 5.4pt" width="75%"> <TR> <TD vAlign=top width="38%"> <P align=center class=MsoNormal style="TEXT-ALIGN: center">参数</P></TD> <TD vAlign=top width="28%"> <P align=center class=MsoNormal style="TEXT-ALIGN: center">单位</P></TD> <TD vAlign=top width="33%"> <P align=center class=MsoNormal style="TEXT-ALIGN: center">型号1</P></TD></TR> <TR> <TD vAlign=top width="38%"> <P>反射镜的最佳尺寸</P></TD> <TD vAlign=top width="28%"> <P>mm</P></TD> <TD vAlign=top width="33%"> <P>4~15</P></TD></TR> <TR> <TD vAlign=top width="38%"> <P>最大扫描角度</P></TD> <TD vAlign=top width="28%"> <P>degrees</P></TD> <TD vAlign=top width="33%"> <P>-50<SUP>0</SUP>~+50<SUP>0</SUP></P></TD></TR> <TR> <TD vAlign=top width="38%"> <P>最大非线性度（最大）</P></TD> <TD vAlign=top width="28%"> <P>%（最小20%）</P></TD> <TD vAlign=top width="33%"> <P>0.08</P></TD></TR> <TR> <TD vAlign=top width="38%"> <P>定位偏移量（最大）</P></TD> <TD vAlign=top width="28%"> <P>μradians/<SUP>0</SUP>C<SUP><p></p></SUP></P></TD> <TD vAlign=top width="33%"> <P>30~50</P></TD></TR> <TR> <TD vAlign=top width="38%"> <P>增益偏移量（最大）</P></TD> <TD vAlign=top width="28%"> <P>ppm/<SUP>0</SUP>C</P></TD> <TD vAlign=top width="33%"> <P>50~100</P></TD></TR> <TR> <TD vAlign=top width="38%"> <P>工作温度</P></TD> <TD vAlign=top width="28%"> <P><SUP>0</SUP>C</P></TD> <TD vAlign=top width="33%"> <P>0~50</P></TD></TR> <TR> <TD vAlign=top width="38%"> <P>带宽（典型）</P></TD> <TD vAlign=top width="28%"> <P>Hz</P></TD> <TD vAlign=top width="33%"> <P>3500</P></TD></TR> <TR> <TD vAlign=top width="38%"> <P>最小响应时间（典型）</P></TD> <TD vAlign=top width="28%"> <P>μs</P></TD> <TD vAlign=top width="33%"> <P>175</P></TD></TR> <TR> <TD vAlign=top width="38%"> <P>扫描周期</P></TD> <TD vAlign=top width="28%"> <P>ms</P></TD> <TD vAlign=top width="33%"> <P>0.8</P></TD></TR></TABLE></DIV> <P >以上所列的动态参数将随镜子的惯性、命令波形以及伺服调整系统而改变。开环模型也可以得到。</P> <P > <p></p></P> <P>如有需要请联系：</P> <P>郭先生13366185911（北京）</P> <P>E-mail: <a href="mailtw-ji@163.com" target="_blank" >w-ji@163.com</A><BR clear=all ></P></td></tr></table> <div class="pattl"> 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