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</div><div class="postaaa posta1" id="post_367936" ><table id="pid367936" class="plhin" summary="pid367936" cellspacing="0" cellpadding="0"> <tr> <td class="pls" rowspan="2"> <div id="favatar367936" class="pls favatar"> <a name="lastpost"></a><div class="pi"> <div class="authi"><a href="http://club.oecr.com/space-uid-59150.html" target="_blank" class="xw1" style="color: #00FF99">chenjun315666</a> </div> </div> <div class="p_pop blk bui card_gender_" id="userinfo367936" style="display: none; margin-top: -11px;"> <div class="m z"> <div id="userinfo367936_ma"></div> </div> <div class="i y"> <div> <strong><a href="http://club.oecr.com/space-uid-59150.html" target="_blank" class="xi2" style="color: #00FF99">chenjun315666</a></strong> <em>当前离线</em> </div><dl class="cl"> <dt>积分</dt><dd><a href="http://club.oecr.com/home.php?mod=space&uid=59150&do=profile" target="_blank" class="xi2">40</a></dd> </dl><div class="imicn"> <a href="http://club.oecr.com/home.php?mod=space&uid=59150&do=profile" 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id="postnum367936" onclick="setCopy(this.href, '帖子地址复制成功');return false;"> <em>2</em>楼</a> </strong> <div class="pti"> <div class="pdbt"> </div> <div class="authi"> <img class="authicn vm" id="authicon367936" src="static/image/common/ico_lz.png" /> 楼主<span class="pipe">|</span> <em id="authorposton367936">发表于 2007-9-12 09:54:18</em> <span class="pipe">|</span> <a href="http://bbs.oecr.com/forum.php?mod=viewthread&tid=58814&page=1&authorid=59150" rel="nofollow">只看该作者</a> </div> </div> </div><div class="pct"><div class="pcb"> <h2>AWM40000系列流量传感器</h2> <div class="t_fsz"> <table cellspacing="0" cellpadding="0"><tr><td class="t_f" id="postmessage_367936"> 气流质量传感器<br /> AWM40000 系列 放大和不放大<br /> AWM40000 系列包括不带放大和放大/ 信号处理的信号。<br /> AWM42150V 和AWM42300，使用和AWM2000 相同的电<br /> 路。AWM43300V 和AWM43600V 使用和AWM3000 相同<br /> 的电路。AWM43600V 为6SLPM 器件。<br /> 图1 发热控制电路<br /> 图2 传感桥路供电电路<br /> 安装尺寸（仅供参考）<br /> 特点：<br /> ● 多个集中安装/O 形密封圈<br /> ● 陶瓷流量管（无引气管），0-1000sccm<br /> ● 塑料流量管（无引气管），0-6SLPM<br /> ● 高共模压力（150psi）<br /> ● 工作温度可至125˚C<br /> ● 零点和满量程高稳定性<br /> AWM40000 系列选型指南<br /> 流量范围<br /> （满量程）<br /> 输出电压<br /> @标定点<br /> 零点电压<br /> 零点漂移<br /> +25~-25˚C<br /> +25~85˚C<br /> 输出电压漂移<br /> +25~-25˚C<br /> +25~+85˚C<br /> 重复性& 迟滞<br /> 压降@满量程<br /> （in H2O）<br /> 电源（VDC）<br /> 功耗（mW）<br /> 反应时间（ms）<br /> 共模压力（psi）<br /> 输出负载<br /> 标定气体<br /> 比率变化量<br /> 工作温度<br /> 储存温度（˚C）<br /> 冲击<br /> AWM42150VH<br /> ±25sccm<br /> 8.5±1.5mV<br /> @25sccm<br /> 0.0±1.0 mV DC<br /> ±0.20mV DC<br /> +2.5% 读数(典型值)<br /> -2.5% 读数(典型值)<br /> ±0.35% 读数<br /> －－－<br /> Min<br /> 8.0<br /> ---<br /> ---<br /> ---<br /> NPN(电流沉):10mA<br /> 氮气<br /> ±0.3% 读数<br /> -25~85C<br /> -40~90C<br /> 100g 峰值(5drops,6axis)<br /> AWM42300V<br /> ±1000sccm<br /> 54.7±3.7mVDC<br /> @1000sccm<br /> 0.0±1.0 mV DC<br /> ±0.20mV DC<br /> ±2.5% 读数(最大值)<br /> +6% 读数(最大值)<br /> ±1.00% 读数<br /> 1.50(典型值)<br /> Typ.<br /> 10±0.01<br /> 50<br /> 1.0<br /> ---<br /> PNP（电流源）：20mA<br /> （AWM42150VH 为氢气）<br /> AWM43300V<br /> +1000sccm<br /> 5±0.15VDC<br /> @1000sccm<br /> 1.00±0.05VDC<br /> ±0.025VDC<br /> -5% 读数(最大值)<br /> +6%读数(最大值)<br /> ±0.5% 读数<br /> 1.02(典型值)<br /> Max.<br /> 15 (2)<br /> 60<br /> 3.0 (1)<br /> 150 (AWM43600V是25psi)<br /> AWM43600V<br /> +6LPM<br /> 5±0.15VDC<br /> @6LPM<br /> 1.00±0.05VDC<br /> ±0.025VDC<br /> -5% 读数(最大值)<br /> +6% 读数(最大值)<br /> ±1.00% 读数<br /> 8.00(典型值)<br /> 注：1、从10%~90% 反应时间一般1 毫秒<br /> 2、输出电压随电源电压而比率变化<br /> 3、重复性和迟滞反应了测量设备的内在精度<br /> 4、最大的防止损坏的流量变化量：5LPM/1.0sec<br /> Honeywell/Commercial Switch&Sensor 霍尼韦尔商业开关与传感器<br /> 上海：Tel:021-62370237 北京：Tel:010-84583280 深圳：Tel:0755-5181226 广州：Tel:020-38791169 e-mail:jian.bo.zhou@honeywell.com <a href="http://www.honeywell.com/sensing" target="_blank">http://www.honeywell.com/sensing</a><br /> - 51 -<br /> 气流质量传感器<br /> AWM40000 系列 放大和不放大<br /> 输出气流VS 器件互换性（初步数据，根据有限的试验数据）<br /> Flow<br /> Sccm<br /> 25<br /> 20<br /> 15<br /> 10<br /> 5<br /> 0<br /> NOM<br /> mVDC<br /> 8.50<br /> 6.80<br /> 5.20<br /> 3.50<br /> 1.70<br /> 0.00<br /> TOL<br /> ±mVDC<br /> 1.5<br /> 1.5<br /> 1.0<br /> 1.0<br /> 1.0<br /> 1.0<br /> AWM43300V<br /> Flow<br /> Sccm<br /> 1000<br /> 900<br /> 800<br /> 700<br /> 600<br /> 500<br /> 400<br /> 300<br /> 200<br /> 100<br /> 0<br /> NOM<br /> VDC<br /> 5.00<br /> 4.97<br /> 4.89<br /> 4.78<br /> 4.63<br /> 4.43<br /> 4.15<br /> 3.76<br /> 3.23<br /> 2.49<br /> 1.00<br /> TOL<br /> ±VDC<br /> 0.15<br /> 0.16<br /> 0.17<br /> 0.18<br /> 0.19<br /> 0.20<br /> 0.21<br /> 0.19<br /> 0.17<br /> 0.14<br /> 0.05<br /> AWM43600V<br /> Flow<br /> Sccm<br /> 6<br /> 5<br /> 4<br /> 3<br /> 2<br /> 1<br /> 0<br /> NOM<br /> VDC<br /> 5.00<br /> 4.89<br /> 4.70<br /> 4.40<br /> 3.80<br /> 3.10<br /> 1.00<br /> TOL<br /> ±VDC<br /> 0.15<br /> 0.20<br /> 0.25<br /> 0.35<br /> 0.30<br /> 0.30<br /> 0.05<br /> AWM42300V<br /> Flow<br /> Sccm<br /> 1000<br /> 800<br /> 600<br /> 400<br /> 200<br /> 0<br /> -200<br /> -400<br /> -600<br /> -800<br /> -1000<br /> NOM<br /> mVDC<br /> 54.7<br /> 53.0<br /> 49.3<br /> 42.5<br /> 29.8<br /> 0.00<br /> -29.8<br /> -42.5<br /> -49.3<br /> -53.0<br /> -55.2<br /> TOL<br /> ±mVDC<br /> 2.0<br /> 2.2<br /> 2.5<br /> 3.0<br /> 3.0<br /> 1.0<br /> 4.0<br /> 5.0<br /> 6.0<br /> 6.0<br /> 6.0<br /> 输出曲线<br /> AWM42150VH<br /> 推荐型号<br /> AWM43600V<br /> 量程<br /> 6LPM</td></tr></table> </div> <div id="comment_367936" class="cm"> </div> <div id="post_rate_div_367936"></div> </div> </div> </td></tr> <tr><td class="plc plm"> </td> </tr> <tr id="_postposition367936"></tr> <tr> <td class="pls"></td> <td class="plc" style="overflow:visible;"> <div class="po hin"> <div class="pob cl"> <em> <a class="fastre" href="forum.php?mod=post&action=reply&fid=34&tid=58814&repquote=367936&extra=&page=1" onclick="showWindow('reply', this.href)">回复</a> <a class="replyadd" href="forum.php?mod=misc&action=postreview&do=support&tid=58814&pid=367936&hash=6a5df51e" onclick="showWindow('login', this.href)" onmouseover="this.title = 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