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<div class="t_fsz"> <table cellspacing="0" cellpadding="0"><tr><td class="t_f" id="postmessage_451005"> <a href="http://opticalfilm.oecr.com" target="_blank" class="relatedlink">薄膜</a><a href="http://opticaltest.oecr.com" target="_blank" class="relatedlink">测量</a><br /> <br /> 薄膜测量系统是基于白光干涉的原理来确定光学薄膜的厚度。白光干涉图样通过数学函数被计算出薄膜厚度。对于单层膜来说，如果已知薄膜介质的n和k值就可以计算出它的<a href="http://theory.oecr.com" target="_blank" class="relatedlink">物理</a>厚度。<br /> AvaSoft-Thinfilm应用<a href="http://opticaldesign.oecr.com" target="_blank" class="relatedlink">软件</a>内包含有一个大部分常用<a href="http://material.oecr.com" target="_blank" class="relatedlink">材料</a>和膜层n和k值的内置数据库。<br /> AvaSoft-Thinfilm系统可以测量的膜层厚度从10 nm到50 &micro;m，分辨率可达1 nm。<br /> 薄膜测量广泛应用于<a href="http://sensor.oecr.com" target="_blank" class="relatedlink">半导体</a>晶片生产工业，此时需要监控等离子刻蚀和沉积<a href="http://optics.oecr.com" target="_blank" class="relatedlink">加工</a>过程。还可以用于其它需要测量在金属和玻璃基底上镀制透明膜层的领域。其他领域中，金属表面的透明涂层和玻璃衬底也需要严格测量。<br /> AvaSoft-Thinfilm应用软件能够实时监控膜层厚度，并且可以与其他AvaSoft应用软件如XLS输出到Excel软件和过程监控软件一起使用。<br /> 薄膜测量的典型装置如图所示。<br /> <br /> <br /> <br /> <br /> 薄膜测量常用配置:<br /> <br /> 光谱仪 AvaSpec-2048光谱仪，UA光栅（200-1100 nm），DUV<a href="http://opticalfilm.oecr.com" target="_blank" class="relatedlink">镀膜</a>，DCL-UV/VIS灵敏度增强透镜，100 &micro;m狭缝，OSC-UA消二阶衍射效应镀膜<br /> 测量膜厚范围 10 nm - 50 &micro;m，1 nm分辨率<br /> 软件 AvaSoft-Thinfilm应用软件<br /> 光源 AvaLight-DHc紧凑型氘-卤素光源<br /> 光纤 1根FCR-7UV200-2-ME反射光纤探头<br /> 附件 THINFILM-STAGE支架，用于固定反射光纤探头<br /> Thinfilm-standard Tile with 3 calibrated different thickness layers of SiO2<br /> <br /> 联系方式：<br /> <br /> 全球总部 <br /> Soerense Zand 4a<br /> NL-6961 LL Eerbeek<br /> The Netherlands, Europe<br /> Tel +31-(0)-313-670170<br /> Fax +31-(0)-313-670179 <br /> <br /> 北京爱万提斯科技有限公司<br /> （Avantes 中国分公司 ） <br /> 地址：北京市朝阳区酒仙桥路12号<a href="http://electronic.oecr.com" target="_blank" class="relatedlink">电子</a>城科技大厦1119房间<br /> 邮编：100016<br /> 电话：010-84574045,010-84574046<br /> 010-84574057<br /> 传真：010-84574017<br /> <br /> 北京爱万提斯科技有限公司<br /> 深圳办事处 <br /> 地址：深圳市福田区滨河路8998号趣园16K室<br /> 邮编：518048<br /> 电话：0755-33339082 <br /> <br /> 北京爱万提斯科技有限公司<br /> 成都办事处 <br /> 成都市金牛区金仙桥路13号左岸公寓616室<br /> 邮编:610031<br /> 电话/传真:028-87685608<br /> <br /> <a href="mailto:info@avantes.com">info@avantes.com</a> <a href="mailto:info@avantes.com.cn">info@avantes.com.cn</a> <a href="mailto:Kelvin.jiang@avantes.com.cn">Kelvin.jiang@avantes.com.cn</a> <a href="mailto:sam.gou@avantes.com.cn">sam.gou@avantes.com.cn</a> <br /> <br /> Last Updated: 05-11-07</td></tr></table> </div> <div id="comment_451005" class="cm"> </div> <div id="post_rate_div_451005"></div> </div> </div> </td></tr> <tr><td class="plc plm"> <div id="p_btn" class="mtw mbm hm cl"> <a href="http://club.oecr.com/home.php?mod=spacecp&ac=favorite&type=thread&id=69743&formhash=324b4c1d" id="k_favorite" onclick="showWindow(this.id, this.href, 'get', 0);" onmouseover="this.title = $('favoritenumber').innerHTML + ' 人收藏'" title="收藏本帖"><i><img 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