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求助: 固体激光器腔内膜Cavity Film on Semi-conductor Laser 的加工
求助高手: 希望介绍 固体激光器腔内膜的镀制要求:
1. Number of Film layers? Total Film Thickness? Film Precition?
膜层数? 总膜厚?精度?
2. Number of crucible pot and Its capacity?
使用坩埚数量和总容量?
3. Number of Crystal Sensor Head?
如用晶控, 传感器探头数?
4. Number of Optical Filter?
如用光控, 滤光片的数量和型号?
5. The Range of Film's Wave Length?
加工所需控制波长范围?
6. The Measurement Range of Optical Thickness Moniter and Crystal Thickness Moniter?
要求光控或晶控的工作范围?
7. Vacuum Degree?
工作时的恢复真空度?
8. MFC GAS Feedthrough Numbers? Mass O2 needed? (It means: Protection against Reoxidation needed. Oil Free Pump needed. High speed and ultra-high vacuum Pump needed.)
流量控制器气体通道种类、数量?是否需要大量氧气?(是否意味着:因为要防止二次氧化而需要无油真空泵和高速、超高真空泵。)
9. Heating Temprature?
基件烘烤温度?
10. IAD needed?
需要离子清洗? 离子辅助?
诚恳希望前辈和朋友们的帮助。
李剑飞 jimlee-lens@sohu.com 13913429901 |
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