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CL5000系列准分子<a href="http://laser.oecr.com" target="_blank" class="relatedlink">激光</a>器<br /> <br /> <br /> <br /> 应用领域 <br /> <br /> 光谱学 <br /> <br /> 光纤布喇格光栅制造 <br /> <br /> <a href="http://material.oecr.com" target="_blank" class="relatedlink">材料</a>微<a href="http://optics.oecr.com" target="_blank" class="relatedlink">加工</a> <br /> <br /> 精细激光打标 <br /> <br /> 激光气相沉积 <br /> <br /> <br /> <br /> 技术特性<br /> <br /> 体积小，紧凑 <br /> <br /> 激光功率稳定 <br /> <br /> 气体使用寿命长 <br /> <br /> 电脑控制 <br /> <br /> 预制混合气体 <br /> <br /> <br /> <br /> <br /> ArF<br /> KrF<br /> XeCl<br /> <br /> 激光波长（可以157nm）<br /> 193 nm<br /> 248 nm<br /> 308 nm<br /> <br /> 放电管材料<br /> 陶瓷<br /> <br /> 预电离<br /> 光晕<br /> <br /> 脉冲能量<br /> 20 mJ<br /> 40 mJ<br /> 25 mJ<br /> <br /> 平均激光功率<br /> CL 5100<br /> CL 5200<br /> CL 5300<br /> <br /> <br /> 2 W<br /> 4 W<br /> 5 W<br /> <br /> <br /> 4 W<br /> 7 W<br /> 10 W<br /> <br /> <br /> 2.5 W<br /> 4.5 W<br /> 6.5 W<br /> <br /> 最大脉冲重复率<br /> CL 5100 <br /> CL 5200 <br /> CL 5300<br /> <br /> <br /> 100 Hz<br /> 200 Hz<br /> 300 Hz<br /> <br /> 脉宽2<br /> 8-10 ns<br /> 9-11 ns<br /> <br /> 脉冲能量稳定度<br /> 西格马< 2%<br /> <br /> 光斑尺寸<br /> 5 x 12 mm<br /> 6 x 12 mm<br /> <br /> 光束发散角<br /> 2 x 4 mrad<br /> <br /> 距标不稳定<br /> < 2 ns<br /> <br /> 窗口服务间隔，脉冲数<br /> 1亿<br /> 2亿<br /> 3亿<br /> <br /> 外形尺寸/重量<br /> 800L x 330W x 571H / 80kg<br /> <br /> 冷却方式<br /> <br /> CL 5100<br /> CL 5200/5300<br /> <br /> <br /> 风冷<br /> <br /> 水冷，<1升/分钟<br /> <br /> 电源输入<br /> 220V / 50Hz, 10А, <1kVA<br /> <br /> 气体<br /> 1预装混合气体罐<br /> <br /> 控制接口<br /> RS 232, DOS/Windows<br /> <br /> 外形尺寸<br /> 865 x 330 x 571 mm<br /> <br /> <br /> <br /> <br /> <a href="http://opticaldesign.oecr.com" target="_blank" class="relatedlink">软件</a>控制界面 <br /> <br /> <br /> <br /> <br /> <br /> <br /> <br /> 2. CL-7000系列准分子激光器<br /> <br /> <br /> <br /> 应用领域 <br /> <br /> 光谱学 <br /> <br /> 光纤布喇格光栅制造 <br /> <br /> 材料微加工 <br /> <br /> 精细激光打标 <br /> <br /> 激光气相沉积 <br /> <br /> <br /> <br /> 技术特性<br /> <br /> 体积小，紧凑 <br /> <br /> 激光功率稳定 <br /> <br /> 气体使用寿命长 <br /> <br /> 电脑控制 <br /> <br /> 预制混合气体 <br /> <br /> <br /> <br /> <br /> ArF<br /> KrF<br /> XeCl<br /> <br /> 激光波长（可以157nm）<br /> 193 nm<br /> 248 nm<br /> 308 nm<br /> <br /> 放电管材料<br /> 陶瓷<br /> <br /> 预电离<br /> 火花<br /> <br /> 脉冲能量<br /> 250mJ<br /> 400mJ<br /> 300mJ<br /> <br /> 平均激光功率<br /> CL 7020<br /> CL 7050<br /> CL 7100<br /> <br /> <br /> 5 W<br /> 10 W<br /> 20 W<br /> <br /> <br /> 10 W<br /> 20 W<br /> 35 W<br /> <br /> <br /> 6 W<br /> 15 W<br /> 25 W<br /> <br /> 最大脉冲重复率<br /> CL 7020 <br /> CL 7050 <br /> CL 7100<br /> <br /> <br /> 20 Hz<br /> 50 Hz<br /> 100 Hz<br /> <br /> 脉宽2<br /> 17ns<br /> 20ns<br /> <br /> 脉冲能量稳定度<br /> 西格马< 2%<br /> <br /> 光斑尺寸<br /> 6 x 20 mm<br /> 6 x 21 mm<br /> 7 x 22 mm<br /> <br /> 光束发散角<br /> 1.5 x 4.5 mrad<br /> <br /> 距标不稳定<br /> < 2 ns<br /> <br /> 窗口服务间隔，脉冲数<br /> 5000万<br /> 1亿<br /> 2亿<br /> <br /> 外形尺寸/重量<br /> 1350L x 375W x 710H / 170kg<br /> <br /> 冷却方式<br /> <br /> CL 7020<br /> CL 7050<br /> <br /> CL 7100<br /> <br /> <br /> 风冷<br /> <br /> 水冷，<1升/分钟<br /> <br /> 水冷，<3升/分钟<br /> <br /> 电源输入<br /> <br /> CL 7020<br /> CL 7050<br /> <br /> CL 7100<br /> 220V / 50Hz, 10А, <1.5kVA<br /> <br /> 220V / 50Hz, 10А, <1.8kVA<br /> <br /> 380/220V / 50Hz, 10А, <3.5kVA<br /> <br /> 气体<br /> 1预装混合气体罐<br /> <br /> 控制接口<br /> RS 232, DOS/Windows<br /> <br /> 外形尺寸<br /> 1420 x 375 x 721 mm<br /> <br /> <br /> <br /> <br /> <br /> <br /> 3. CL-7500系列准分子激光器<br /> <br /> <br /> <br /> 应用领域<br /> <br /> LIF光谱学 <br /> <br /> 高精度微加工 <br /> <br /> <br /> 技术特性<br /> 由2台CL7020或CL7050组成，配有特制光学器件和同步装置 <br /> <br /> 可运行于两张波长，是“振荡级－放大级”结构形式 <br /> <br /> <br /> 技术参数<br /> 激光波长, nm<br /> 248<br /> 308<br /> <br /> 脉冲能量, mJ<br /> 200<br /> 100<br /> <br /> 最高脉冲重复率, Hz<br /> 20 or 50<br /> <br /> 线宽, nm<br /> < 0.003<br /> <br /> <br /> <br /> <br /> <br /> <br /> <br /> <br /> <br /> <br /> 4. CL-7000K系列准分子激光器<br /> <br /> <br /> <br /> 应用领域<br /> <br /> 材料微加工 <br /> <br /> 精密微型打标 <br /> <br /> 脉冲激光沉积 <br /> <br /> <br /> 技术特性<br /> 最高脉冲重复率1kHz <br /> <br /> 陶瓷放电腔 <br /> <br /> 激光功率稳定 <br /> <br /> 气体使用寿命长 <br /> <br /> 光学器件使用寿命长 <br /> <br /> 电脑控制 <br /> <br /> 快速光学器件替换 <br /> <br /> 无油真空泵 <br /> <br /> 预装混合气体罐 <br /> <br /> <br /> <br /> 激光波长<br /> 193 nm<br /> 248 nm<br /> <br /> 放电室材料<br /> 陶瓷<br /> <br /> 预电离<br /> 火花<br /> <br /> 脉冲能量<br /> 24 mJ<br /> 40 mJ<br /> <br /> 激光平均功率<br /> 24 W<br /> 40 W<br /> <br /> 最高脉冲重复率<br /> 1000 Hz<br /> <br /> 脉宽 (FWHM)<br /> 14 ns<br /> 20 ns<br /> <br /> 脉冲能量稳定度<br /> 西格玛 < 2%<br /> <br /> 距标不稳定<br /> ± 2 ns<br /> <br /> 光斑尺寸 (FWHM)<br /> 5 x 16 mm<br /> <br /> 窗口服务间隔，脉冲数<br /> 3亿<br /> 5 亿<br /> <br /> 冷却方式<br /> 冷却水， < 1升/分钟<br /> <br /> 气体<br /> 1 预装混合气体罐<br /> <br /> 控制<br /> RS 232, DOS/Windows<br /> <br /> 用电量<br /> 4.5 kW<br /> <br /> 外形尺寸/重量<br /> 1350L x 375W x 710H mm / 170 kg<br /> <br /> <ignore_js_op> <img 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