求助：怎样解决膜层的牢固性？

国产镀膜机吧？主泵是扩散泵吧？

1.基片的清洁度非常重要

2.夹具和治具的清洁度和干燥要保证

建议用 喷砂清洗干净后 在200度的烘箱内烘烤2小时

3.棱镜比较厚 升温时间要保证到棱镜的温度和设定温度一致

建议先用3小时(含升温和恒温时间),再逐步的降

4.应考虑把镀膜的温度提高,至少使用300度,建议350度

5.镀膜完成后 保温30分钟,再降温

6.如果有离子源不会有类似问题

There are a number of ways to modify the nucleation density of
depositing atoms on substrate surfaces including:
• Change the deposition temperature
increasing—increases reaction with the surface; increases surface mobility
decreasing—decreases surface mobility
• Increase the deposition rate to increase collision probability of the adatoms
• Change the surface chemistry to make the surface more
reactive—e.g., cleaning,oxygen treatment of polymer
surfaces
• Sensitizing the surface by the addition of “nucleating agents”
• Generation of nucleation sites on the surface—e.g., lattice
defects, charge sites on insulators by
© energetic particle bombardment to produce lattice
defects
© incorporation of species into the surface by ion
implantation or chemical substitution
© electron bombardment —charge centers on
insulator surfaces
© photon bombardment ]—charge centers on insulator
Surfaces
• Co-deposition or absorption of reactive species
• Surface morphology—roughening or smoothing
• Creation of a new surface—“basecoat” or “glue layer”

国产机子常会有这种现像

不要一有问题就扯到国产机上!还是跟工艺有关!除了tiakongxbz说的我还想补充几点,膜系设计注意底层材料选择跟基底结合好的材料,膜层太厚的注意一下应力问题!听楼主的描述好象跟膜层应力大也有一定关系!

恩，楼上说的好啊，应该是应力有问题了，我看主要是低n的材料应力大了