急问：谁知道VASE（variable angle spectroscopic ellipsometer）是个什么仪器，中

VUV-VASE from J.A. Woollam (Lincoln, Neb.) is a vacuum ultraviolet variable angle spectroscopic ellipsometer for determining the optical properties of films from 145 to 1700 nm. It has been used in the characterization of 157 nm-based lithography processes, and has the flexibility to measure the composition and thickness of oxynitride and perovskite gate materials, as well as high-bandgap semiconductor materials

variable 多变的 angle 角度 spectroscopic 分光 ellipsometer 偏振光椭圆率计算仪

综合分析

可变角度的频谱椭偏仪。利用反射光的偏振特性改变来研究反射界面。主要用于薄膜的光学特性分析。

谢谢了