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长脉冲激光损伤YAG晶体的研究
Analysis of YAG Crystal Damage lnduced by Long Pulse Laser
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作 者:李长青[1] 王树成[1] 周玉锋[2] 张明福[2] 高丽敏[1]
hi Changqing ,Wang Shucheng ,Zhou Yufeng ,Zhang Mingfu ,Gao Limin (1. College of Materials Science and Engineering, Heilongjiang University of Science and Technology, Harbin, Heilongjiang 150027 ,China; 2. Institute of Composite and Structure, Harbin Institute of Technology, Harhin, Heilong.iiang 150001 ,China)
机构地区:[1]黑龙江科技大学材料科学与工程学院,黑龙江哈尔滨150027 [2]哈尔滨工业大学复合材料与结构研究所.黑龙江哈尔滨150001,黑龙江哈尔滨150027
出 处:《山东科技大学学报:自然科学版》 2015年第34卷第1期 74-79页,共6页
Journal of Shandong Univ of Sci and Technol: Nat Sci
基 金:黑龙江省教育厅科学技术研究项目(12531586); 黑龙江省高等教育教学改革项目(GJZ201301060); 黑龙江科技大学教学研究项目(JY13-90)
摘 要:采用毫秒Nd∶YAG脉冲激光在不同的保护气体作用下对钇铝石榴石(yttrium aluminum garnet,YAG)晶面单脉冲损伤及多脉冲切割进行了研究,激光损伤及切割断口形貌采用SEM进行表征。结果表明:单脉冲TEM00模式Nd∶YAG激光对YAG晶体损伤时,表面能够生成锥形烧蚀坑(钥匙孔),且烧蚀坑的熔融层约几个微米;毫秒多脉冲Nd∶YAG激光在Ar,N2,O2保护下切割YAG单晶体,切割深度与保护气第一电离能相关。切割状态下,断口出现爆沸现象,产生的气泡形貌与保护气氛有关。
Single pulse damage and multi-pulse cutting yttrium aluminum garnet (YAG) by millisecond Nd : YAG pulse laser were investigated. Morphology of laser damage and cutting fracture were characterized by scanning elec- tronic microscope (SEM). The result shows that ablation hole (keyhole) is formed by single pulse TEM00 mode Nd : YAG laser,and the thickness of molten layer of ablation hole is about several micrometers; cutting depth of YAG single crystal is related with the first ionic energy of shielding gas and micro-morphologies of their cutting frac tures differ prominent under Ar,N2·O2 by multi pulse ms Nd : YAG laser. In cutting condition, explosive boiling takes place within cutting kerr,and the morphologies of bubbles changes with shielding gas atmosphere.
关键词:钇铝石榴石 激光切割 保护气 爆沸
YAG ; laser cutting ; shielding gas ; explosive boiling ; |
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