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class="t_fsz"> <table cellspacing="0" cellpadding="0"><tr><td class="t_f" id="postmessage_651575"> 芯片与封装互连技术时间:2010-05-30 14:01来源:MEMS<a href="http://news.oecr.com" target="_blank" class="relatedlink">资讯</a>网 作者:MEMS 点击:126次<br /> 芯片与封装互连的方式主要有：引线键合（BW-Wire Bonding）、载带自动键合（TAB-Tape Automated Bonding）和倒装芯片键合技术（FCT-Flip Chip Technology）等。<br /> 芯片与封装互连的方式主要有：引线键合（BW-Wire Bonding）、载带自动键合（TAB-Tape Automated Bonding）和倒装芯片键合技术（FCT-Flip Chip Technology）等。引线键合（WB）技术是用金属丝将集成<a href="http://electronic.oecr.com" target="_blank" class="relatedlink">电路</a>芯片上的电极引线与集成电路底座外引线连接在一起的过程，通常采用热压、热超声和超声方法进行。<br /> <br /> 1）热压键合法：热压键合法的机制是低温扩散和塑性流动（Plastic Flow）的结合，使原子发生接触，导致固体扩散键合。键合时承受压力的部位，在一定的时间、温度和压力的周期中，接触的表面就会发生塑性变形（Plastic Deformation）和扩散。塑性变形是破坏任何接触表面所必需的，这样才能使金属的表面之间融合。在键合中，焊丝的变形就是塑性流动。该方法主要用于金丝键合。<br /> <br /> 2）超声键合法：超声键合是塑性流动与摩擦的结合。通过石英<a href="http://material.oecr.com" target="_blank" class="relatedlink">晶体</a>或磁力控制，把摩擦的动作传送到一个金属<a href="http://sensor.oecr.com" target="_blank" class="relatedlink">传感</a>器（Metal“HORN”）上。当石英晶体上通电时，金属传感器就会伸延；当断开电压时，传感器就会相应收缩。这些动作通过超声发生器发生，振幅一般在4～5个微米。在传感器的末端装上焊具，当焊具随着传感器伸缩前后振动时，焊丝就在键合点上摩擦，通过由上而下的压力发生塑性变形。大部分塑性变形在键合点承受超声能后发生，压力所致的塑变只是极小的一部分，这是因为超声波在键合点上产生作用时，键合点的硬度就会变弱，使同样的压力产生较大的塑变。该键合方法可用金丝或铝丝键合。<br /> <br /> 3）热超声键合法：这是同时利用高温和超声能进行键合的方法，用于金丝键合。表1中对三种引线键合<a href="http://optics.oecr.com" target="_blank" class="relatedlink">工艺</a>优缺点进行了比较。<br /> <br /> <br /> 为了适应超窄引线间距、多引脚和薄外形封装要求，TAB技术应用越来越普遍。虽然载带价格较贵，但引线间距最小可达到150μm，而且TAB技术比较成熟，自动化程度相对较高，是一种高生产效率的内引线键合技术。<br /> <br /> 倒装芯片键合技术是目前<a href="http://sensor.oecr.com" target="_blank" class="relatedlink">半导体</a>封装的主流技术，是将芯片的有源区面对基板键合。在芯片和基板上分别制备了焊盘，然后面对面键合，键合<a href="http://material.oecr.com" target="_blank" class="relatedlink">材料</a>可以是金属引线或载带，也可以是合金焊料或有机导电聚合物制作的焊凸。倒装芯片键合引线短焊凸直接与印刷线路板或其它基板焊接，引线电感小，信号间窜扰小，信号传输延时短，电性能好，是互连中延时最短、寄生效应最小的一种互连方法。表2中对这几种芯片互连技术的特点进行了比较。<br /> <br /> <br /> </td></tr></table> </div> <div id="comment_651575" class="cm"> </div> <div 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