<<HANDBOOK OF THIN-FILM DEPOSITION PROCESSES AND TECHNIQUES>>

<<HANDBOOK OF THIN-FILM DEPOSITION PROCESSES AND TECHNIQUES>>
Principles, Methods, Equipment and
Applications
Second Edition
Edited by
Krishna Seshan
Intel Corporation
Santa Clara, California
NOYES PUBLICATIONS
WILLIAM ANDREW PUBLISHING
Norwich, New York, U.S.A.



Copyright &copy; 2002 by Noyes Publications
No part of this book may be reproduced or
utilized in any form or by any means, electronic
or mechanical, including photocopying,
recording or by any information storage and
retrieval system, without permission in writing
from the Publisher.
Library of Congress Catalog Card Number: 2001135178
ISBN: 0-8155-1442-5
Printed in the United States
Published in the United States of America by
Noyes Publications / William Andrew Publishing
13 Eaton Avenue
Norwich, NY 13815
1-800-932-7045
www.williamandrew.com
www.knovel.com
10 9 8 7 6 5 4 3 2 1
Library of Congress Cataloging-in-Publication Data
Handbook of Thin-Film Deposition Processes and Techniques / [edited]
by Krishna Seshan. -- 2nd edition
p. cm.
Includes bibliographical references and index.
ISBN 0-8155-1442-5
1. Thin film devices -- Design and construction -- Handbooks,
manuals, etc. I. Seshan, Krishna. II. Title.
TK7872.T55H36 2001135178
621.381'72--dc19 CIP

<<HANDBOOK OF THIN-FILM DEPOSITION PROCESSES AND TECHNIQUES Principles, Methods, Equipment and Applications >>继续上传播

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只是英文差一點

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