mems推荐阅读的专业书

RF Circuit Design by Christopher Bowick, Cheryl Ajluni, John Blyler

An Introduction to Microelectromechanical Systems Engineering by Nadim Maluf, Kirt Williams

Microsystem Design by Stephen Senturia

RF MEMS: Theory, Design, and Technology by Gabriel M. Rebeiz

RF MEMS Circuit Design

Practical RF Circuit Design for Modern Wireless Systems, Volume I : Passive Circuits and Systems by Les Besser, Rowan Gilmore

Micromachined Transducers Sourcebook

An Introduction to Linear Control Systems (Control and Systems Theory ; V. 5) by Thomas E. Fortmann, Konrad L. Hitz

Linear Control Systems Engineering (Hardcover) by Morris Driels (Author)

Process Control: Modeling, Design and Simulation by B. Wayne Bequette

University Physics (with InfoTrac) by Ronald Lane Reese