磁控溅射铝镜生产中的关键技术问题及解决办法

磁控溅射铝镜生产中的关键技术问题及解决办法
Key Technological Issues and Solutions During the Production of Magnetron Sputtering Aluminum Mirror
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作　　者：刘增喜 张金镌
LIU Zeng-xi, ZHANG Jin-jun （ Qingdao HICORP Group Co, Ltd, Qingdao 266400, China）
机构地区：青岛环球集团股份有限公司,青岛266400
出　　处：《建材世界》 2014年第35卷第3期 91-94页,121页,共5页
Science and Technology of Overseas Building Materials
摘　　要：磁控溅射铝镜生产线经过合理设计配置了真空溅射镀膜段，自动化程度高，大幅度降低了磁控溅射铝镜生产线的造价，实现了磁控溅射铝镜的低成本、高效率生产，是制镜行业生产设备的转型升级，也进一步实现了大型镀膜设备的国产化。该文针对在真空镀铝过程中经常遇到的问题做了简要阐述，同时针对这些问题给出了相应的修改建议。
The magnetron sputtering aluminum mirror production line distributed with vacuum sputtering coating section through proper design improves the level of automation,remarkably decreases the cost of production line and a-chieves the effective production of magnetron sputtering aluminum mirror with low cost,which is a transformation and upgrading of production equipment of mirror making industry and implements domestication of large scale coating e-quipment.This article briefly illustrates issues occurred in the procedure of vacuum aluminum coating and proposes relevant modification against these issues.
关键词：镀膜室 跑偏 漆刀 漆膜
coating room ;deviation ;paint knife ;paint film ;