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双振镜激光扫描加工误差精密校正
Precise correction for dual-galvanometric laser scanning manufacturing
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作 者:郝俊明 邢刚 李江明
HAO Jun-ming, XING Gang, LI Jiang-ming (North China Research Institute of Electro-optics, Beijing 100015 ,China)
机构地区:华北光电技术研究所,北京100015
出 处:《激光与红外》 CSCD 2009年第39卷第12期 1271-1274页,共4页
Laser & Infrared
摘 要:主要讨论了用传统的补偿畸变的方法校正振镜二维扫描光学系统中图形畸变后,为进一步提高精度,利用图像处理技术,进行二次闭环误差校正,使在10mm×10mm的加工平面内,校正后的精度优于3μm。
By using traditional method, dual-galvanometric laser scanning manufacturing errors is reduced, but for farther precision improving, a new method, which use image processing is introduced. Through the second closed-loop error revision,the precision is better than 3 μm in the area of 10 mm × 10 mm working face.
关键词:激光加工 振镜扫描 加工误差 图像处理
laser manufacturing ; galvanometric scanning ; manufacturing errors ;image processing ; |
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