金刚石研磨液抛光高硬度不锈钢工艺研究

金刚石研磨液抛光高硬度不锈钢工艺研究
CMP of stainless steel 1 1Cr17 with diamond slurry
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作　　者：王志强[1] 豁国燕[1] 方伟[1] 王沛[2] 刘弟鑫[1]
WANG Zhi-qiang, HUO Guo-yan, FANG Wei, WANG Pei, LIU Di-xin （1. Zhengzhou Research Institute for Abrasives ＆ Grinding Co. Ltd. , Zhengzhou 450001, China）  （2. Henan University of Technology, Zhengzhou 450001, China）
机构地区：[1]郑州磨料磨具磨削研究所有限公司,郑州450001 [2]河南工业大学,郑州450001
出　　处：《金刚石与磨料磨具工程》 2014年第6期 76-79页,83页,共5页
Diamond ＆ Abrasives Engineering
摘　　要：研究了11Cr17不锈钢的抛光工艺。通过考察抛光液理化指标参数以及抛光工艺条件对不锈钢去除速率、反射率、表面粗糙度值 Ra的影响,确定了合适的抛光工艺：抛光时间60 min、系统压力150 N、磨盘转速50 r/min。经此条件抛光后的不锈钢表面平整光亮,去除速率0.0477 mm/min,反射率为47%,表面粗糙度值 Ra为21 nm。
The polishing process of 1 1Cr17 stainless steel was studied. The effects of slurry characteristics and polishing conditions on removal rate,reflectivity and roughness（Ra）of the stainless steel were examined.Optimized polishing process conditions were as follows：polishing time 60 min, system pressure 150 N,and disc rotation speed 50 r/min.The stainless steel surface was smooth and bright after polishing on these conditions.The removal rate was 0.047 7 mm/min and the reflectivity 47%,as well as the surface roughness Ra 21 nm.
关键词：不锈钢 抛光 反射率 表面粗糙度
stainless steel ;polishing ;reflectivity ;surface roughness ;