数控抛光非球面面形误差补偿技术研究

数控抛光非球面面形误差补偿技术研究
Research on Compensation of Computer Controlled Polishing  Aspheric Surface-Shape Error
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作　　者：徐海华
Xu Haihua（ Department of Mechanical Engineering, Chongqing Three Gorges University,  Chongqing 404000, China）
机构地区：重庆三峡学院机械工程学院,重庆404000
出　　处：《激光与光电子学进展》 CSCD 2014年第51卷第10期 172-176页,共5页
Laser ＆ Optoelectronics Progress
摘　　要：采用传统方法抛光高精度非球面时，多次面形误差补偿耗费时间占其抛光总时间的80％以上，严重影响非球面的加工效率。根据非球面的面形误差补偿原理，进行抛光非球面面形误差补偿的工艺实验。采用LOH—data—correct软件对非球面进行计算，并修正补偿其面形，可减少面形修正次数，降低成本，提高加工效率。
When the traditional method is used consumption of surface-shape error compensation for polishing high-precision aspheric surface, the time is more than 80% of the total polishing time. The efficiency of aspheric surface machining is severely affected. According to the principle of compensation for aspherical surface-shape error, process experiments of error compensation of polishing surface figure is conducted. By calculation and compensation of aspherical surface-shape using the software LOH-data-correct, the times of surface-shape correction and the cost are reduced, the machining efficiency is improved.
关键词：光学制造 抛光 非球面 面形误差 补偿技术
optical fabrication ; polishing ;aspheric surface ; surface-shape error ; compensation technology ;